Z-axis counterweight device of a large-diameter aspheric optical element precision detection platform

Abstract

The invention provides a Z-axis counterweight device of a precision testing platform for a large-aperture aspheric optical component, and relates to a three-coordinate measuring machine. The Z-axis counterweight device comprises a connecting support plate, a guide rail, a slide block, a Z-axis movement component, a measuring head, stay wires, measuring components, a concave slide rail, counterweight components and a control circuit, wherein the guide rail is arranged on the left side of the connecting support plate; the Z-axis movement component is connected with the slide block; the measuring head is arranged on the Z-axis movement component which is connected with the lower ends of the measuring components through a first stay wire; the measuring components are located on the left side of the connecting support plate and comprise a casing, a sensor pressure part and a piezoelectric sensor; the concave slide rail is arranged at the upper end of the connecting support plate; the counterweight components comprise a magnetorheological fluid container, a magnetorheological fluid and a mass block, the magnetorheological fluid container is arranged on the right side of the connecting support plate, the magnetorheological fluid is contained in the magnetorheological fluid container, the mass block is soaked in the magnetorheological fluid, and the upper end of the mass block is connected with the upper end of the casing of the measuring components through a second stay wire which is in slide fit with the concave guide rail; and the control circuit comprises a signal conversion device and an electrode.

Description

technical field [0001] The invention relates to a three-coordinate measuring machine, in particular to a Z-axis counterweight device for a large-caliber aspheric optical element precision detection platform. Background technique [0002] In a three-coordinate measuring machine, the Z-axis is often fixed in the vertical direction. In order to prevent the Z-axis moving parts from falling down and damage the measuring head, and at the same time ensure that the moving parts are light and stable when moving up and down, and reliable and stable when stopping, it is necessary to add a weight equal to that of the moving parts in the design of the Z-axis mechanism. Opposite balancing device. In the design of the balance device, it must be ensured that when the Z-axis moving parts are in any working position, the magnitude and direction of the balance force should always remain unchanged (1, Zhang Guoxiong. Coordinate Measuring Machine [M], Tianjin University Press, 1999 , 71-76). ...

AI Technical Summary

Problems solved by technology

[0003] During the measurement process of the three-coordinate measuring machine, due to the inconsistency of the acceleration generated by the Z-axis motion component when the Z-axis motion component needs to move up and down due to the replacement of different types of measurement devices or the detection platform is working, the weights at both ends of the steel wire are unbalanced, causing the linear motor on the Z-axis motion component to fall. Electricity, which affects the measurement efficiency and accuracy of the three-coordinate measuring machine

[0005] At present, there is no Z-axis counterweight device on the large-aperture aspheric optical element precision detection platform that uses magnetorheological fluid regulation to realize self-adaptive counterweight.

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