Silicon powder conveying equipment and system with same for synthesizing trichlorosilane

Abstract

The invention discloses silicon powder conveying equipment and a system with the same for synthesizing trichlorosilane. The silicon powder conveying equipment comprises a drying tank and a feeding tank, wherein the drying tank is used for drying silicon powder; the feeding tank is connected with the drying tank and is suitable for feeding silicon powder into a synthesis furnace; the feeding tank comprises a feeding tank body, a first nitrogen feed port and a silicon powder outlet; a silicon powder accommodating space is arranged in the feeding tank body; the first nitrogen feed port is formed in the feeding tank body for supplying nitrogen into the silicon powder accommodating space; the silicon powder outlet is formed in the feeding tank body for discharging silicon powder from the silicon powder accommodating space. The silicon powder conveying equipment is simple, and easy to operate, stable and reliable operation of the trichlorosilane synthesis system can be guaranteed, and the synthesis efficiency is improved.

Description

technical field [0001] The invention relates to the field of chemical industry, in particular, the invention relates to a silicon powder transmission device and a system for synthesizing trichlorosilane with the same. Background technique [0002] In the synthesis of trichlorosilane, due to the high hardness of silicon powder, the wear and tear on pipes and valves is serious, and there are corrosive substances such as HCl and chlorosilane on the side of the trichlorosilane synthesis furnace. If the material or process is not selected properly, strong corrosion will occur in HCL reverse series, making the entire system unable to operate safely and stably, shortening the life of the silicon powder conveying system equipment, and greatly increasing production costs. The traditional process generally adopts the feeding method in the middle of the synthesis furnace. In this way, the silicon powder is taken out of the synthesis furnace after reaction, resulting in waste of raw mat...

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Problems solved by technology

[0002] In the synthesis of trichlorosilane, due to the high hardness of silicon powder, the wear and tear on pipes and valves is serious, and there are corrosive substances such as HCl and chlorosilane on the side of the trichlorosilane synthesis furnace. If the material or process is not selected properly, strong corrosion will occur in HCL reverse series, making the whole system unable to operate safely and stably, shortening the life of the silicon powder conveying system equipment, and greatly increasing the production cost

The traditional process generally uses the feeding method in the middle of the synthesis furnace. In this way, the silicon powder is taken out of the synthesis furnace after reaction, resulting in waste of raw materials; in addition, only the outer jacket heating method is used in the drying process; the drying effect is not good; Moreover, the synthesis furnace is generally synthesized at normal pressure, and there are some defects in preventing HCL from being reversed during the feeding process.

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