Precision sensor of micro spring-like structure

Abstract

The invention provides a precision sensor of a micro spring-like structure. The precision sensor comprises a nut, a base, an MEMS capacitive sensor, a micro sensor head and leads, wherein the MEMS capacitive sensor sequentially comprises a lower electrode plate, insulating media, micro springs and an upper electrode plate from bottom to top, and the upper electrode plate is fixed to the insulating media through the micro springs. After force is exerted onto the micro sensor head, the upper electrode plate of an internal MEMS capacitor and the micro springs of the internal MEMS capacitor are driven, therefore, the capacitance is changed, finally, conversion from a force value to the capacitance value is achieved, and the weight of a sensed object is obtained. According to the micromechanical system, the design size is effectively changed, the size of the sensor is made to be smaller, and the sensor is made to be more precise.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a precision sensor with a microspring structure. Background technique [0002] At present, most of the load cells commonly used in the world are resistive structures, which are measured by resistance strain gauges. The strain gauge structure has insurmountable defects in low-range precision measurement: the strain gauge needs deformation space and cannot be reduced in size; at the same time, the temperature drift of the strain gauge is insurmountable and affects the measurement accuracy, especially for ultra-precision measurement. A higher level of precision. [0003] The present invention adopts a capacitive structure: the sensing part of the structure is a micro-spring capacitive structure manufactured by MEMS (Micro-Electro-Mechanical Systems, Micro-Electro-Mechanical Systems) technology, and the transmission of the weight signal of the measured object is realized through the change of...

AI Technical Summary

Problems solved by technology

[0004] The invention proposes a precision sensor with a micro-spring structure, which solves the problems of large volume and low precision of the resistance strain gauge sensor in the prior art

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