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MEMS sensor for measuring gas suspended particle concentration based on structural resonance

A gas suspension and resonance measurement technology, applied in the field of MEMS sensors, can solve the problems of high power consumption, large size, inconvenience to carry, etc., and achieve the effects of low cost, small size and low power consumption

Active Publication Date: 2013-11-27
SENODIA TECH (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The above measurement methods and the sensors used are of high cost, large volume, high power consumption, and inconvenient to carry

Method used

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  • MEMS sensor for measuring gas suspended particle concentration based on structural resonance
  • MEMS sensor for measuring gas suspended particle concentration based on structural resonance
  • MEMS sensor for measuring gas suspended particle concentration based on structural resonance

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Embodiment Construction

[0023] In order to make the technical means, technical features, invention objectives and technical effects realized by the present invention easy to understand, the present invention will be further described below in conjunction with specific illustrations.

[0024] Such as figure 1 Shown is a MEMS sensor for measuring the concentration of gas suspended particles based on structural resonance of the present invention, including a cavity 101, which includes a cavity channel structure wafer 102, a vibration structure, and a cavity structure that are sequentially combined from top to bottom. Wafer 103 and substrate wafer 104 form an inner hollow chamber 105 between cavity channel structure wafers 102. The cavity channel structure wafer of the present invention is formed by bonding upper and lower wafers .

[0025] The present invention also includes a filtering structure 200 , a gas pressure generating structure 300 , a gas sampling structure 400 and a vibrating structure 500 ...

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Abstract

The invention discloses an MEMS sensor for measuring gas suspended particle concentration based on structural resonance, which comprises a cavity, and further comprises a filtering structure, an air pressure producing structure, a gas sampling structure and a vibration structure, wherein a hollow chamber is formed in the cavity; the filtering structure and the air pressure producing structure are oppositely arranged at the two ends of the cavity chamber and communicated with the cavity chamber; the gas sampling structure and the vibration structure are oppositely arranged inside the cavity chamber. The MEMS sensor monitors the gas suspended particle concentration through detecting the change of vibration frequency or amplitude caused by the suspended particles attached to the vibration structure. Compared with the conventional particle sensor, the main body of the MEMS sensor is manufactured through adopting MEMS microfabrication technology, and the MEMS sensor has the advantages of low cost, small size, low power consumption and the like, and is suitable for consumer electronics and portable equipment.

Description

technical field [0001] The invention relates to a MEMS sensor, in particular to a MEMS sensor for measuring the concentration of gas suspended particles based on structural resonance. Background technique [0002] It is known that changes in the structure and mass in the resonance state will lead to changes in the amplitude and vibration frequency, and the magnitude of the mass change can be measured by detecting this change. [0003] At present, the gravimetric method is mainly used in the determination of atmospheric particulate matter in my country. The principle is to extract a quantitative volume of air at a constant speed through a sampler with a certain cutting feature, so that PM2.5 and PM10 in the ambient air are trapped in a filter of known quality. On the membrane, the concentrations of PM2.5 and PM10 are calculated according to the quality difference of the filter membrane before and after sampling and the sampling volume. [0004] The following are two commonly ...

Claims

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Application Information

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IPC IPC(8): G01N15/06
Inventor 邹波郭梅寒
Owner SENODIA TECH (SHANGHAI) CO LTD
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