Holding clamp for etching

Abstract

A holding clamp for etching comprises two side plates, a plurality of support rods, a plurality of clamp plates, at least two clamp plate sliding rods and at least one clamp plate press rod, wherein the two side plates are disposed at a left side and a right side respectively; the plurality of support rods are connected to the two side plates; the plurality of clamp plates are disposed between the two side plates; the at least two clamp plates are disposed between the two side plates and pass through the plurality of clamp plates; and the at least one clamp plate press rod is disposed on one side plate. With the above structure, the holding clamp can hold workpieces such as glass sheets or wafers etching and make etching liquid flow smoothly. Edges of the workpieces such as the glass sheets or the wafers are not contacted with the clamp, so that the edges can be etched clean.

Description

technical field [0001] The present invention relates to a holding fixture used in glass edge strengthening wet etching process, but is not limited to this application. This kind of holding fixture can improve the uniformity and efficiency of the liquid flow field without touching the edge of the object to be etched, so that the uniformity and yield of the edge etching are greatly improved, and it can also reduce the soaking and cleaning time after etching, and improve the cleaning efficiency. Can avoid acid residue. Background technique [0002] In the integrated circuit or panel manufacturing process, the traditional fixture for removing the remaining photoresist by wet etching such as figure 1 As shown, when a workpiece 104 such as a glass sheet or a wafer is clamped by the fixture 102, there are at least four contact points, so that the etching is incomplete and residues remain on the edge, which is the most disadvantageous for the panel. In addition, because the bottom...

AI Technical Summary

Problems solved by technology

Although it can prevent the glass bottom plate from breaking, the edge of the glass bottom plate is still in contact with the fixture, and the lower frame makes the flow field of the etching solution not smooth, which is its disadvantage

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