Actuator, optical scanner and image forming device

An actuator and scanner technology, applied in the fields of actuators, optical scanners and image forming devices, can solve problems such as large shape deviation, and achieve the advantages of reducing shape deviation, reducing moment of inertia, and reducing moment of inertia. Effect

Active Publication Date: 2016-08-10
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, when anisotropic etching as described above is used to manufacture a movable plate having an octagonal shape in plan view, the shape varies greatly due to the relationship with the crystal plane.

Method used

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  • Actuator, optical scanner and image forming device
  • Actuator, optical scanner and image forming device
  • Actuator, optical scanner and image forming device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0085] First, a first embodiment of the optical scanner of the present invention will be described.

[0086] figure 1 It is a plan view showing the optical scanner (actuator) of the first embodiment of the present invention, figure 2 yes figure 1 The A-A line sectional view in image 3 is for illustration figure 1 A top view of the movable plate provided by the optical scanner shown, Figure 4 yes figure 1 The BB line sectional view in Figure 5 yes Figure 4 A partial enlarged cross-sectional view. Figure 6 is true figure 1 The cross-sectional view illustrating the manufacturing method of the optical scanner is shown, Figure 7 is true figure 1 A cross-sectional view illustrating the fabrication method of the optical scanner is shown. Figure 8 is true figure 1 The cross-sectional view illustrating the manufacturing method of the optical scanner is shown, Figure 9 is for illustration Figure 8 (e) A diagram showing the formation of the connection portion in t...

no. 2 approach

[0259] Next, a second embodiment of the present invention will be described.

[0260] Figure 11 is a plan view showing an optical scanner according to a second embodiment of the present invention, Figure 12 yes Figure 11 Partial enlarged cross-sectional view of line BB in .

[0261] Hereinafter, the optical scanner of the second embodiment will be described focusing on differences from the optical scanner of the above-mentioned embodiment, and descriptions of the same matters will be omitted.

[0262] The optical scanner of the second embodiment is almost the same as the optical scanner 1 of the first embodiment except that the cross-sectional shape of the connecting portion is different. In addition, the same code|symbol is attached|subjected to the same structure as the above-mentioned embodiment.

[0263] Such as Figure 11 As shown, the optical scanner 1A of this embodiment has a base 2A having a vibration system. The base body 2A has a movable plate 21 , a suppor...

no. 3 approach

[0271] Next, a third embodiment of the present invention will be described.

[0272] Figure 13 It is a plan view for explaining the movable plate included in the scanner according to the third embodiment of the present invention.

[0273] Hereinafter, the optical scanner of the third embodiment will be described focusing on differences from the optical scanner of the above-mentioned embodiment, and the description of the same matters will be omitted.

[0274] The optical scanner of the third embodiment is almost the same as the optical scanner 1 of the first embodiment except that the shape of the movable plate in plan view is different. In addition, the same code|symbol is attached|subjected to the same structure as the above-mentioned embodiment.

[0275] Such as Figure 13 As shown, the movable plate 21C included in the optical scanner of this embodiment is composed of a main body 212C, a pair of protrusions 213C, 214C protruding from the main body 212C to both sides in...

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PUM

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Abstract

An actuator comprising: a movable part that can swing around a swing shaft; a connecting part that extends from the movable part and is torsionally deformed in accordance with the swing of the movable part; and A support part supports the said connection part, and the said movable part has a cross shape when it planarly views from the thickness direction of the said movable part.

Description

technical field [0001] The present invention relates to an actuator, an optical scanner, and an image forming device. Background technique [0002] As an actuator, an actuator using a torsional vibrator is known (for example, refer to Patent Document 1). [0003] For example, in Patent Document 1, there is disclosed a movable plate (movable part), a support frame (support part), and a pair of elastic support parts (connection parts) that support the movable plate so as to be able to twist relative to the support frame. , and each elastic support portion is a light deflector composed of two rods (beam members). [0004] Such a movable plate, a support frame, and a pair of elastic support portions are integrally formed by anisotropically etching a silicon substrate whose main surface is composed of a silicon (100) surface. [0005] In addition, in the optical deflector of Patent Document 1, the movable plate has an octagonal shape in plan view. A movable plate having such a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K33/00B81B3/00G02B26/10
CPCH02K33/16G02B26/085
Inventor 日野真希子沟口安志
Owner SEIKO EPSON CORP
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