Transverse Shear Interferometer for Measuring Non-axisymmetric Wavefronts
A transverse shearing, non-axisymmetric technology, applied in the direction of measuring devices, measuring optics, optical radiation measurement, etc., can solve the problems that the shearing interferometry method is not given, cannot be built, etc., and the shearing amount can be adjusted, The effect of simple structure
Active Publication Date: 2016-07-06
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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[0003] The prior art [1] (Murty, M.V.R.K. "A compact lateral shearing interferometer based on the Michelson interferometer." Applied Optics 9.5:1146-1148 (1970)) uses a beam splitter to achieve beam shearing interference, but it is impossible to build two beams with shearing directions perpendicular to each other on the same horizontal platform. road interferometer
[0004] The prior art [2] (Hii, KingUng, and KuanHiangKwek."Dual-prisminterferometerforcollimationtesting."AppliedOptics48.2:397-400(2009)) utilizes double right-angle prisms to realize beam shearing interference, but does not give the shearing interference in two perpendicular directions. tangential interferometry, that is, non-axisymmetric wavefronts cannot be measured
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[0016] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.
[0017] see first figure 1 , figure 1 It is a schematic diagram of the optical path of a transverse shearing interferometer for measuring non-axisymmetric wavefronts in the present invention. Depend on figure 1 It can be seen that the transverse shearing interferometer for measuring non-axisymmetric wavefronts in the present invention consists of a beam splitting unit 1, a shearing interference unit 2 in the x direction, a shearing interference unit 3 in the y direction, a first image sensor 4, a second image sensor 5 and The computer 6 is formed, the beam splitting unit 1 includes an aperture 101, a first beam splitter 102, a parallel plate 3 and a mirror 4, and the x-direction shearing interference unit 2 includes a second beam splitter 201, a first Right-angl...
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A horizontal shear interference instrument that measures the non -axis symmetrical wave surface is used to detect the wave surface of the complex wave surface.Sensor and computer composition.The present invention uses right -angle prism to implement the beam X direction shear, trapezoidal rectangular prism realizes the Y direction shear, and uses the mobile platform to adjust the amount of shear volume.It has the advantages of simple and compact structure, operating on the same platform, and adjustable cutting volume.
Description
technical field [0001] The invention relates to a transverse shearing interferometer, in particular to a transverse shearing interferometer for measuring non-axisymmetric wave fronts. Background technique [0002] The existing wavefront measurement technologies mainly include: the Shaker-Hartmann wavefront sensor that inverts the wavefront from the slope of the beam wavefront, the curvature wavefront sensor that inverts the wavefront from the curvature of the beam wavefront, and the A linear phase wavefront sensor that inverts the wavefront by focusing the light spot, and a shearing interferometer that inverts the wavefront by the interference fringes generated by the beam. Shearing interferometers also include radial shearing interferometers and transverse shearing interferometers, which are widely used because they do not need to introduce a reference wavefront and have a simple structure. [0003] The prior art [1] (Murty, M.V.R.K. "A compact lateral shearing interferome...
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IPC IPC(8): G01J9/02G01B11/24
Inventor 周健鲁伟马小平孙建锋孙志伟刘立人
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI