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Fixtures for Quartz Wafer Edger

A quartz wafer and edger technology, which is applied to machine tools, grinders, and manufacturing tools suitable for grinding workpiece edges, can solve the problems of inaccurate positioning, low positioning accuracy, and low wafer edge grinding accuracy, and achieve automatic Positioning and clamping, realizing the effect of automatic positioning operation

Active Publication Date: 2016-01-13
RES INST OF ZHEJIANG UNIV TAIZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the positioning accuracy of the fixture of the existing edging machine is low. When edging the quartz wafer, due to the inaccurate positioning, the edging accuracy of the wafer is low, and the qualified rate of the product is reduced.

Method used

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  • Fixtures for Quartz Wafer Edger

Examples

Experimental program
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Effect test

Embodiment Construction

[0019] Such as figure 1 As shown, the fixture used for the quartz wafer edger of the present invention includes a base 7 on which a guide rail 2 is fixedly arranged; two ends of the guide rail 2 are movably connected to two sliders 9; the top of each slider 9 is fixedly arranged There are positioning claws 1, and two positioning claws 1 are arranged oppositely; two sliders 9 are driven by the cylinder 4;

[0020] The middle part of the guide rail 2 is fixedly provided with an air intake platform 8, and the suction platform 3 is fixedly provided on the air intake platform 8; the suction platform 3 is located between the two positioning claws 1;

[0021] The suction table 3 is provided with a negative pressure generating device; the negative pressure generating device is connected to a negative pressure sensor 6; the negative pressure sensor 6 is connected to the cylinder 4 through a signal line;

[0022] The suction table 3 is provided with a position sensor 5; the position se...

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Abstract

The invention discloses a jig for a quartz crystal wafer edge grinding machine. The jig comprises a base, wherein the base is fixedly provided with a guide rail, the two ends of the guide rail are respectively and movably connected with a sliding block, the top of each sliding block is fixedly provided with a locating claw, and the two locating claws are oppositely arranged. The two sliding blocks are driven by a cylinder, an absorption table is fixedly arranged between the two locating claws, the absorption table is provided with a negative-pressure generation device which is connected with a negative-pressure sensor, the negative-pressure sensor is connected with the cylinder through a signal wire, the absorption table is provided with a position sensor, and the position sensor is connected with the negative-pressure generation device. The jig can automatically locate and clamp quartz crystal wafers on the full-automatic edge grinding machine.

Description

technical field [0001] The invention relates to processing equipment for quartz wafers, in particular to a fixture for a quartz wafer edge grinder. Background technique [0002] The fully automatic high-speed edging machine needs to clamp and fix the quartz wafer through the clamp during the working process. Since the edger runs at high speed during the working process, its fixture is required to be able to position the wafer stably and reliably. However, the positioning accuracy of the fixture of the existing edging machine is low. When the quartz wafer is edged, due to the inaccurate positioning, the edging accuracy of the wafer is low, and the qualified rate of the product is reduced accordingly. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a fixture for a quartz wafer edger, which can improve the positioning accuracy of the fixture. [0004] In order to solve the above-mentioned technical problems, the t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B9/16B24B41/06
CPCB24B9/16B24B41/06
Inventor 王维锐李广平范建伟鄢光明汪盈
Owner RES INST OF ZHEJIANG UNIV TAIZHOU
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