A Gradient Pitch Graphite Boat
A graphite boat, gradual change technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of low product qualification rate, uneven film thickness, inconsistent appearance and color of anti-reflection film, etc.
Active Publication Date: 2015-11-18
CHINT NEW ENERGY TECH (HAINING) CO LTD
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Problems solved by technology
[0006] In order to solve the problems of inconsistency in the appearance and color of the anti-reflection film prepared in the prior art, uneven film thickness and low product qualification rate, the present invention provides a method for coating a silicon wafer and a graphite boat used in the method
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[0027] The following disclosure provides many different embodiments or examples for implementing different structures of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Furthermore, the present invention may repeat reference numerals and / or letters in different instances. This repetition is for the purpose of simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. It should be noted that the components illustrated in the figures are not necessarily drawn to scale. Descriptions of well-known components and processing techniques and processes are omitted from the present invention to avoid unnecessarily limiting the present invention.
[0028] In the graphite boat provided by the present invention, a plurality of graphite sheets arranged in parallel are included. From the center of the graphite boat...
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The invention discloses a graphite boat with gradient type spacing. The graphite boat comprises multiple graphite flakes which are arranged in parallel, wherein from the center of the graphite boat to the outer side of the graphite boat, the spacing between two adjacent graphite flakes is sequentially D0, D1 until Dn-1, Dn; the size relationship of D0, D1 until Dn-1, Dn is that D0 is greater than D1, until Dn-1 is greater than Dn; the difference between D0 and D1 is equal to the difference between D1 and D2, until the difference between Dn-1 and Dn is equal to a, wherein a is greater than 0, and is the distance difference between two adjacent graphite flakes. Accordingly, the invention also provides a method for coating a silicon wafer by using the graphite boat. By adopting the technical scheme provided by the invention, the problem of uneven thickness of an antireflective coating after coating by the graphite boat can be effectively solved, and the percent of pass of products is improved.
Description
technical field [0001] The invention relates to the technical field of solar cell sheet processing, in particular to a graded pitch graphite boat. Background technique [0002] The growing demand for solar cells drives the continuous advancement of solar cell manufacturing processes. In order to obtain high-quality solar cells, researchers have made great efforts to develop each step of their production process and the materials used. Since the quality of the anti-reflection film will have a great impact on the performance of the solar cell, technicians are constantly improving the preparation method of the anti-reflection film and related equipment and materials. [0003] In the preparation process of silicon solar cells, it is usually necessary to use a thin film deposition process to coat silicon wafers. An antireflection film is formed on the surface of the sheet. [0004] When coating the surface of the silicon wafer, first insert the uncoated silicon wafer into the ...
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IPC IPC(8): C23C16/458
Inventor 胡金艳韩玮智王仕鹏黄海燕陆川
Owner CHINT NEW ENERGY TECH (HAINING) CO LTD