Method for manufacturing curved-surface fly-eye micro lens with different focal lengths
A curved surface compound eye and microlens technology, which is applied in the fields of lenses, optics, instruments, etc., can solve problems such as poor controllability, difficulty in ensuring the shape accuracy of microlens arrays, and inability to achieve non-uniform focal lengths and accurately controllable curved surface microlens arrays. Achieve the effect of low manufacturing cost
Active Publication Date: 2015-02-18
XIAMEN UNIV
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Problems solved by technology
Due to the poor controllability of these special processing methods, it is difficult to guarantee the shape accuracy of the microlens array, and it is impossible to realize the above-mentioned curved surface microlens array with non-uniform focal length and accurate controllability
Therefore, the processing method has become a bottleneck restricting the wide application of fly-eye lens imaging technology.
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[0046]The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0047] A method for manufacturing curved surface fly-eye microlenses with different focal lengths, the curved surface fly-eye lens involved in manufacturing such as figure 1 As shown, it consists of a microlens array distributed on a curved surface. figure 2 yes figure 1 In the vertical section of the curved fly-eye lens shown, the focal length of each microlens is set according to certain rules, so that the light passing through each lens can be focused on the plane under the curved surface.
[0048] Described a kind of method of manufacturing the curved surface fly-eye microlens with different focal lengths is specifically:
[0049] 1. A micromachining process is used to fabricate an array of multiple units on the substrate 10, each of which is composed of at least one lower electrode 40, a cavity 50, and an electrostatic deformation film 60 coverin...
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Abstract
The invention provides a method for manufacturing a curved-surface fly-eye micro lens with different focal lengths. The method is characterized in that a voltage is applied onto multiple groups of lower electrode assemblies which are electrically isolated with one another so as to enable an electrostatic deformation film to deform under the action of an electrostatic force, since different voltages are applied onto a plurality of groups of lower electrode assemblies which are electrically isolated, the deformation amounts of the electrostatic deformation film are different, and the micro lens in an obtained polymer micro-lens array has different focal lengths. Silicone rubber is smeared on the polymer micro-lens array in a rotating manner, stripped after being solidified and attached to the surface of a vacuum pore, a silicon-rubber film is bent into a curved surface under the vacuum action, so that the curved-surface fly-eye micro lens with the different vocal lengths is formed. Compared with an existing manufacturing method of the curved-surface fly-eye lens, the method has the advantages that the cost is low, the curvature of the curved surface, and the focal lens, the surface diameter and the distance of the micro lens on the curved surface are controllable, and a mold adopting the electrostatic deformation film can be produced in batch.
Description
technical field [0001] The invention relates to a method for manufacturing a miniature passive optical element, in particular to a method for manufacturing a fly-eye microlens with different focal lengths. Background technique [0002] In nature, biological compound eyes are composed of a group of "small eyes" gathered together, and usually the entire compound eye has a curved structure. The entire field of view can be divided into several parts through these ommatidia, and each ommatidium corresponds to a certain field of view angle, and is only responsible for observing a small part of the field of view. Together they form a complete image of the entire field of view. Fly-eye lens is a miniature passive optical element of bionic insect compound eyes, which has the advantages of large field of view, high sensitivity to moving objects, and unlimited depth of field. These characteristics have important application value in military, medical imaging, engineering measurement,...
Claims
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IPC IPC(8): G02B3/00G02B1/04G02B1/10
Inventor 吕苗孙鸿达吴昭邓盛锋崔晓斌
Owner XIAMEN UNIV