Method for manufacturing curved surface zoom compound eye micro lens at top end of imaging optical fiber
A technology of imaging optical fiber and manufacturing method, which is applied in the directions of lenses, optics, optical components, etc., can solve the problems of difficult to guarantee the shape accuracy of the microlens array, poor controllability, etc., and achieve the effects of controllable curvature and cost reduction.
Active Publication Date: 2014-12-17
XIAMEN UNIV
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Problems solved by technology
Due to the poor controllability of these special processing methods, it is difficult to guarantee the shape accuracy of the microlens array, and the above-mentioned curved microlens array with non-uniform focal length and accurate controllability cannot be realized at present.
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[0037] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0038] A method for manufacturing a curved surface variable focal length fly-eye microlens located at the top of an imaging optical fiber, the specific implementation steps are:
[0039] 1. Fabricate a variable focal length photoresist lens array 50 on the substrate 10 using a micromachining process;
[0040] refer to figure 1 A, the substrate 10 can be a silicon wafer, and a layer of silicon dioxide layer 20 is formed by thermal oxidation on the substrate 10, and a photoresist layer 30 is formed on the silicon dioxide layer 20 by one or more times of spin coating. The thickness of the photoresist layer is in the range of 1-100 microns. In this embodiment, positive photoresist AZ4620 is used, and its thickness is preferably 32 microns.
[0041] refer to figure 1 B, using a laser lithography machine to expose the photoresist layer 30, the exposure do...
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Abstract
The invention discloses a method for manufacturing a curved surface zoom compound eye micro lens at the top end of an imaging optical fiber. The method includes the steps of manufacturing a single-layer or multi-layer columnar photoresist array on a substrate through a laser lithography process, arranging columnar photoresist in the array according to height and appearance through certain rules by changing the exposure dose, and forming the columnar photoresist array into a micro lens through heating and cooling in a backflow mode; applying polymer to the photoresist micro lens array through rotation, curing to form a flexible mold, curving the flexible mold into a curved surface under the action of pressure, dropping optical resin to the curved surface flexible mold, stripping to form the zoom compound eye micro lens, and mounting the micro lens at the top end of the imaging optical fiber. According to the method for manufacturing the curved surface zoom compound eye micro lens at the top end of the imaging optical fiber, the micro lens can be put into mass produced, the costs are low, and the curvature of the curved surface and the focal length, surface diameter and spacing of the micro lens on the curved surface are controllable.
Description
technical field [0001] The invention relates to a manufacturing method of an optical element, in particular to a manufacturing method of a curved variable-focus fly-eye microlens located at the top of an imaging optical fiber. Background technique [0002] At present, minimally invasive surgery and endoscopic diagnosis and treatment usually use two-dimensional imaging systems. It is difficult to obtain information about the distance between surgical instruments and human tissues, and it is easy to cause damage to blood vessel walls, intestinal walls, etc.; it is also impossible to measure the volume of infected tissues. Doctors can only rely on experience to determine the scope of surgery. The three-dimensional endoscopic imaging system can provide the above information, thereby improving the accuracy of diagnosis and reducing the difficulty of surgery, which has become a research hotspot in this field. [0003] Compound eyes are composed of a group of "small eyes" gathered...
Claims
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IPC IPC(8): G02B3/00G02B1/04G02B1/10
Inventor 吕苗邓盛锋吕金科冯兴兴
Owner XIAMEN UNIV