A kind of preparation method of micro-concave mirror
A technology of micro-concave surface and substrate, which is applied in the preparation of smooth mirror surface, micro-concave mirror, and micro-concave mirror with controllable focal length. It can solve the problems of difficult precise control, difficult mirror surface, and large restrictions. Effects with a wide range, smooth mirror surface, and easy operation
Active Publication Date: 2016-01-06
中科芯未来微电子科技成都有限公司
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Problems solved by technology
However, these methods have their own shortcomings
For example, the isotropic etching technology of the bulk silicon process is limited by the material, and when the dry etching technology is used, the mirror surface obtained is difficult to be very smooth; the residual stress-induced bending technology of the double-layer thin film material can control the micro-concave surface The focal length of the mirror, but it is difficult to accurately control the residual stress of the material, especially the residual stress control between multi-layer thin film materials, it is easy to cause film damage due to excessive stress; high temperature reflow of thick glue has strict requirements on temperature control , and the subsequent etching process is likely to introduce micro-nano structures on the surface of the photoresist and then reduce the smoothness of the surface
Method used
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[0033] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0034] Such as Figure 1~Figure 9 Shown: micro-concave mirror of the present invention can obtain by following process step, and described process step specifically comprises:
[0035] a. A first substrate 101 is provided, and a hydrophilic material layer 102 is provided on the surface of the first substrate 101;
[0036] Such as figure 1 As shown: the material of the first substrate 101 includes single crystal silicon, polycrystalline silicon or glass. The material of the hydrophilic material layer 102 includes silicon dioxide, silicon nitride, single crystal silicon, polycrystalline silicon, or nanofibers formed after plasma bombardment of polymers whose surface has been bombarded by oxygen plasma. The polymer of the nanofiber includes photoresist or Parylene, and the plasma bombarding the polymer includes oxygen plasma or argon plasma. In the embodiment ...
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Abstract
The invention relates to a preparation method of a micro-concave mirror. The preparation method comprises the following steps of: distributing structures or materials with hydrophilic and lyophobic differences on the surface of a base to realize graphical distribution of liquid on the surface of the base, wherein the outline of the liquid can be effectively regulated and controlled according to parameters including the size of a hydrophilic region, a contact angle of a lyophobic region, a volume of a liquid drop and the like; then obtaining a concave surface with a smooth surface in a PDMS (Polydimethylsiloxane) flexible material by utilizing the compactness of the PDMS flexible material and taking the liquid drop as a mould, wherein the focal distances of the concave surfaces obtained by the liquid drops with different outlines are different; finally, obtaining the micro-concave mirror with reflection and light condensation functions by combining a metal sputtering process. The preparation method of the micro-concave mirror provided by the invention is simple in process and convenient to operate; the surface of the obtained micro-concave mirror is smooth and the focal length is controllable; the applicable range of the micro-concave mirror is wide.
Description
technical field [0001] The invention relates to a method for preparing a MEMS concave mirror, especially a method for preparing a micro-concave mirror, specifically a method for preparing a micro-concave mirror with a smooth mirror surface and controllable focal length, belonging to MEMS (Micro-Electro-Mechanical Systems ) technical field. Background technique [0002] With the development of micro-opto-electromechanical systems, micro-concave mirrors that can realize light reflection and converging functions have important applications in many fields ranging from astronomical observation to micro-organism detection, and these fields require various indicators of micro-concave mirrors, including The requirements for the smoothness of the mirror surface and the controllability of the focal length are becoming more and more stringent. So far, various methods have been proposed for the preparation of micro-concave mirrors, including using the isotropic etching technology of th...
Claims
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IPC IPC(8): B81C1/00
Inventor 毛海央
Owner 中科芯未来微电子科技成都有限公司