A four-quadrant tilt tracking sensor capable of self-adaptive correction of adjustment errors
A four-quadrant detector and four-quadrant technology, applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems that it is difficult to achieve sub-micron assembly accuracy, and achieve easy transformation and upgrading, simple structure, improved sensitivity and dynamic range Effect
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[0035] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0036] The present invention proposes such as figure 1 A four-quadrant tilt tracking sensor that can self-adaptively correct installation and adjustment errors is shown. On the basis of the traditional four-quadrant tilt tracking sensor, a wavefront tilt corrector 1 and a self-calibration processor 5 are added. The working process is divided into The following two steps:
[0037] 1. Calibration steps:
[0038] Input the standard plane wave 6 before the wavefront tilt corrector 1, due to the existence of the installation error, the center of mass of the light spot formed at the four-quadrant detector 3 after the standard plane wave 6 passes through the imaging lens 2 will deviate from the origin of the four-quadrant detector 3, Such as image 3 As shown on the left, the output signals of each quadrant of the four-quadrant detector 3 are as foll...
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