Substrate processing equipment

Abstract

PROBLEM TO BE SOLVED: To provide a substrate processing device which can prevent erroneous detection of passage of a substrate by shortening convergence of an oscillating movement of an oscillating member and improve processing efficiency of the substrate by reducing an interval of substrate transfer and increasing transfer efficiency of the substrate.SOLUTION: A substrate detection device 2 of a substrate processing device 1 includes: a detection roller 6 on one end portion of an oscillating member 5; a weight 5C and a magnet 7 on the other end portion of the oscillating member 5; a detection sensor 8 which outputs a detection signal DS by detecting the change in a magnetic field generated by the magnet 7 when the oscillating member 5 is rotated in a rotation direction R from an initial position P1 of the oscillating member before a substrate B contacts the detection roller 6; and an oscillation stopper 11 which contacts the oscillating member 5 in order to maintain a state in which the oscillating member 5 is held obliquely with respect to a vertical line Z1 at the initial position P1 of the oscillating member 5. At the initial position P1 of the oscillating member 5, the oscillating member 5 is held obliquely with respect to the vertical line Z1.

Description

technical field [0001] Embodiments of the present invention relate to a substrate processing apparatus for transferring and processing substrates such as glass substrates of liquid crystal display devices. Background technique [0002] When manufacturing a glass substrate for a display device such as a liquid crystal display device, the substrate is conveyed in a substrate processing apparatus and various processes are performed on the substrate. The processing performed on the substrate by the substrate processing apparatus includes, for example, resist coating processing, resist stripping processing, etching processing, and cleaning processing. For example, when a substrate processing apparatus performs a cleaning process on a substrate, a cleaning treatment liquid is supplied to the surface of the substrate while the substrate is being transported by the substrate transport unit. [0003] Such a substrate processing apparatus has a substrate detection device that detects...

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Problems solved by technology

[0004] However, in the substrate processing apparatus described above, when the conveyed substrate collides with the detection roller and the swing member rotates, the swing member swings like a pendulum, and the swing motion of the swing member may not converge immediately.

Therefore, the reed switch detects the change of the magnetic field generated by the magnet many times, so there is a possibility of erroneously detecting the passage of the substrate

In addition, it takes time for the swing member to return to the converging position, so until the previous substrate is detected by the detection roller and the swing motion of the swing member converges, the next substrate cannot be transported and detected by touching the substrate with the detection roller.

Therefore, the substrate transfer interval at which the substrate transfer unit can transfer the substrate cannot be reduced, and the transfer efficiency of the substrate is poor, so the processing efficiency of the substrate cannot be improved.

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