Temperature control method of semiconductor heat treatment equipment
A technology for heat treatment equipment and semiconductors, used in temperature control, non-electric variable control, control/regulation systems, etc., can solve problems such as loss, and achieve the effects of low cost, increased reliability, and high reliability
Active Publication Date: 2014-03-26
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
There are defects in this over-temperature alarm processing method, that is, if the over-temperature thermocouple or the sampling channel fails, it may directly cause the heating to stop, or even terminate the process, resulting in unnecessary losses
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[0018] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0019] It should be noted that, and please combine image 3 The semiconductor heat treatment equipment includes a furnace body 10 and a process tube 20 arranged in the furnace body. The wafer 30 is processed in the process tube 20. The furnace body 10 includes a plurality of temperature zones, for example, it can be divided into five temperature zones. 101, 102, 103, 104 and 105, each temperature zone is provided with at least one overtemperature thermocouple and a plurality of temperature control thermocouples; wherein, the overtemperature thermocouple is used to sense the temperature in the temperature zone, and the temperature control thermocouple The coupler is used to adjust the temperature in this temperature zone.
[0020] For example, the first temperature zone 101 is provided with an overtemperature thermocouple OT1, and t...
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The invention relates to a temperature control method of semiconductor heat treatment equipment. The heat treatment equipment comprises a furnace and a technology pipe arranged in the furnace, the semiconductor technology is performed on a wafer in the technology pipe, the furnace comprises a plurality of temperature zones, at least one over-temperature thermocouple and a plurality of temperature control thermocouples are arranged in each temperature zone, the over-temperature thermocouples are used for sensing temperatures in the temperature zones, and the temperature control thermocouples are used for adjusting the temperatures in the temperature zones. The method includes the following steps of a) performing weighted grading on alarming signals of the over-temperature thermocouples and alarming signals of the temperature control thermocouples, and b) stopping outputting electric power to the heat treatment equipment if a grade is not lower than a first threshold value. According to the method, the reliability when heating measures is stopped is increased, and reliable and stable operation of the equipment is better guaranteed through adjustment of the main temperature control thermocouples and the auxiliary temperature control thermocouples and by the adoption of different temperature control modes specifically.
Description
technical field [0001] The invention relates to the field of semiconductor processing and manufacturing, and more specifically, to a temperature control method for semiconductor heat treatment equipment. Background technique [0002] The process of semiconductor manufacturing usually consists of several different "heating-constant temperature-cooling" processes. In order to ensure the long-term safe and stable continuous operation of semiconductor heat treatment equipment, the collection of various signals on the equipment, fault diagnosis and solutions Must have higher requirements. [0003] At present, the over-temperature alarm processing method adopted by semiconductor heat treatment equipment is to place an over-temperature thermocouple in each temperature zone of the heat treatment equipment. If the equipment is in the running stage, the temperature detected by the over-temperature thermocouple exceeds the system set If the temperature alarm upper limit is reached, th...
Claims
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IPC IPC(8): G05D23/22
Inventor 张乾王艾
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD