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A test method for reaction source bottle

A technology of reaction source bottle and test method, which is applied in the test field of reaction source bottle, can solve problems such as the influence of production rhythm, the difficulty of grasping the accuracy of data collection, and the accuracy of research parameters, so as to avoid adverse effects and make the test method accurate and reliable Effect

Active Publication Date: 2016-03-02
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The defect of this method is that in the actual process of the reaction process, the accuracy of data collection is difficult to grasp, which affects the accuracy of the relationship between the research parameters, and often needs to be completed through multiple data collections; moreover, in the actual process of the reaction process Collecting data during the process will also have a certain impact on the production beat

Method used

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  • A test method for reaction source bottle
  • A test method for reaction source bottle
  • A test method for reaction source bottle

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Experimental program
Comparison scheme
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Embodiment 1

[0021] In this embodiment, first introduce the specific structure of the test device used in the present invention. see figure 1 , figure 1 It is a schematic diagram of the external structure of the test device used in the test method for the reaction source bottle of the present invention. As shown in the figure, the test device includes a balance 1, the bottle body 2 of the reaction source bottle is placed horizontally on the balance 1, and the balance is used for weighing the change of the reaction source bottle before and after the test. The bottleneck of bottle body 2 is flange shape, and bottle cap 3 is connected with flange bottleneck by bolt 17. The bottle body is made of transparent material, which is convenient for real-time observation of bubbles and liquid level changes during the test. The specific materials and grades of the components of the test device should be selected according to the working temperature, working pressure, properties of the working medium...

Embodiment 2

[0056] In this embodiment, the test device is exactly the same as that in the first embodiment, and the test method is to calculate and obtain the key technical parameters required by measuring the change of the liquid level of the test water in the source bottle.

[0057] Before the experiment, fill the bottle with test water, close the inlet valve and the outlet valve, and measure the liquid level in the source bottle at this time to be 152.3mm. Open the air inlet valve and the air outlet valve to start the test, and use a stopwatch (not shown in the figure) to record the test time, and observe and adjust the air flow of the flowmeter to 2L / min and the pressure in the reaction source bottle during the test. . After a period of time, stop the stopwatch and close the air inlet valve and the air outlet valve. The stopwatch time is 1400.5min, and the liquid level in the source bottle is 147.2mm. Therefore, according to the formula Δm=ρ×s×h, the mass change of the water in the s...

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Abstract

The invention discloses a testing apparatus and a testing method for a reaction source bottle. The testing apparatus comprises a source bottle body, and a gas inlet pipe, a gas outlet pipe and a thermocouple, which are arranged on a bottle cap of the bottle body; the testing apparatus is characterized by also comprising a balance, the source bottle body is arranged on the balance, and one end of the gas inlet pipe stretches into the bottle body and the other end of the gas inlet pipe is connected with a gas supply device; one end of the gas outlet pipe is communicate with the bottle body and the other end of the gas outlet pipe is connected with a tail gas collecting device; a first pressure gauge and a liquid level sensor are arranged on the bottle cap, a second pressure gauge is arranged on the gas outlet pipe and a flowmeter is arranged on the gas inlet pipe; a valve is arranged on at least one of the gas inlet pipe and the gas outlet pipe. According to the testing apparatus and the testing method, the relations among gas inflowing quantity, liquid level height, solution temperature, pressure in bottle and liquid source carrying volume of the reaction source bottle under a room temperature condition can be accurately acquired through testing calculation, the testing device has a simple structure and is easy to operate, the testing method is accurate and reliable and is suitable for popularization in factories.

Description

technical field [0001] The invention relates to a reaction source bottle used in atomic layer deposition equipment, and more particularly, to a test method for the reaction source bottle. Background technique [0002] Atomic Layer Deposition (ALD), first known as Atomic Layer Epitaxy (ALE), is a semiconductor thin film preparation technology proposed by Finnish scholar Tuomo Suntola. [0003] The main reaction method of the atomic layer deposition technology is: at a certain temperature, the first reaction precursor is introduced into the reaction chamber of the atomic layer deposition equipment, so that the precursor molecules are adsorbed on the surface of the substrate to form an active agent; When the adsorption of the substance reaches a saturated state, the first precursor and by-products are removed; then, the second reaction precursor is introduced, and the second precursor and the active agent that has been adsorbed on the surface of the substrate, that is, the firs...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/448G01D21/02
Inventor 苏艳波兰云峰任鑫
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD