MEMS and detection circuit

Abstract

The invention provides a micro electro mechanical system and a detection circuit. Periodically-changing electric charges are output by a self-testing capacitor array in the detection circuit, so self-testing of the detection circuit can be carried out through the periodically-changing electric charges output by the self-testing capacitor array in the detection circuit, and there is no need that a driving module of the detection circuit generates high-voltage driving signals to enable micro-machine self-testing capacitors in a micro-machine sensor to output periodic electric charge signals needed by self-testing. Thus, the self-testing process of the detection circuit does not need participation of the micro-machine sensor any more, the self-testing process of the detection circuit is simplified, and self-testing reliability is improved; meanwhile, the micro-machine self-testing capacitors are not needed in the micro-machine sensor any more, and therefore design complexity of the micro-machine sensor and design difficulty of the driving module of the detection circuit are reduced.

Description

technical field [0001] The invention relates to the technical field of integrated circuits, in particular to a micro-electromechanical system and a detection circuit. Background technique [0002] There are more and more micro-electromechanical systems (MEMS) applications, which mainly include micro-mechanical sensors and detection circuits. Among them, micro-mechanical sensors require detection circuits to detect changes in the sensor and perform corresponding signal processing. A large part of the micro-mechanical sensors adopt the capacitive sensing method, and the corresponding detection circuit is used to detect the capacitance change of the micro-mechanical sensing capacitor. In the initial stage of MEMS design, it is necessary to judge whether the MEMS sensor and detection circuit can work normally. Micromechanical sensors can be tested with special detection methods, but the detection circuit should have a self-test method to judge whether it is good or bad; in addi...

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Problems solved by technology

[0008] The purpose of the present invention is to provide a micro-electromechanical system and a detection circuit to solve the problem that in the prior art, the detection circuit cannot complete the self-test function alone and needs to rely on micro-mechanical sensors, which will cause inconvenience and low reliability of the self-test process ; In addition, the need to provide high-voltage and synchronous driving signals increases the design difficulty of the detection circuit drive module; the micro-mechanical sensor also improves the performance of the micro-mechanical sensor because it needs to design an additional set of comb-shaped micro-mechanical self-test capacitors. The problem of design complexity

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