Heating device of semiconductor heat treatment device, service part of heating device and repair method of heating device
A technology of heat treatment equipment and heating device, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., and can solve problems such as short contact of heating wire 31, loss of support, and suspension of heating wire 31
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0032] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0033] It should be noted that please combine figure 1 refer to Figure 6 , a heating device for semiconductor heat treatment equipment of the present invention, including figure 1 In addition to the heat insulating layer 2 of the furnace body, the heating wire 31 and the supporting insulating part 32 for fixing the heating wire on the insulating layer 2, an auxiliary maintenance insulating part 33 is also included.
[0034] In this embodiment, as shown in the figure, the heating wire 31 is wound into a spiral shape and installed against the inner wall surface of the furnace body insulation layer 2, and the supporting insulating member 32 is embedded in the insulation layer 2, and the heating wire 31 is arranged at a certain distance. Wires 31 are mounted on the inner surface of the insulation layer 2 . When the heating device of...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com