Probe bench, and organic thin-film device preparation and test integrated system and method

A technology of organic thin film and testing method, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve problems affecting test results, etc., and achieve the effect of improving the generation effect and test accuracy

Inactive Publication Date: 2014-05-14
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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Problems solved by technology

However, when the prepared or generated organic thin film device samples with high environmental requirements are taken out from the organic thin film device preparation device and placed in the probe station for electrical property testing, due to the above-mentioned failure in the organic thin film device preparation device A probe station that is integrated or hermetically connected to an organic thin film device preparation device, so the sample will inevitably be exposed to the atmosphere, which will affect the test results

Method used

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  • Probe bench, and organic thin-film device preparation and test integrated system and method
  • Probe bench, and organic thin-film device preparation and test integrated system and method
  • Probe bench, and organic thin-film device preparation and test integrated system and method

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Embodiment Construction

[0020] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0021] As mentioned above, in the invention patent application filed by the applicant on February 24, 2012 with the application number 201210046050.4 and titled "Integrated Device for Fabrication of Organic Thin Film Devices on Flexible Substrates", a An integrated device for the preparation of organic thin film devices on a flexible substrate. The integrated device is mainly divided into three parts, namely a thin film growth chamber, a transition chamber and a glove box. The preparation process of thin film samples is isolated from the external environment, and the vacuum degree and atmosphere can be adjusted in each chamber to meet the optimal preparation adj...

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Abstract

The invention provides a probe bench, and an organic thin-film device preparation and test integrated system and method. An organic thin-film device preparation apparatus (200) and a probe bench (100) are connected in a sealing mode, and an externally sealed sample transmission channel is formed between the two, a sample is transmitted between the organic thin-film device preparation apparatus (200) and the probe bench (100) via the sample transmission channel, and the whole course of a sample transmission process is isolated from the effects of external environmental atmosphere, so that the generation and test of an organic thin-film device are both isolated from external environment and are disposed in an enclosed and vacuum environment, thus the test accuracy is effectively improved.

Description

technical field [0001] The invention belongs to the field of preparation and testing of nanometer devices and / or organic thin film devices, in particular, relates to a probe station device for organic thin film device testing and an organic thin film device for integrated preparation and testing of organic thin film devices An integrated system and method thereof are prepared and tested. Background technique [0002] In terms of device performance characterization and basic research, probe stations are relatively mature conventional measurement equipment, especially in the field of optoelectronic testing, and are widely used in the measurement of electrical properties of semiconductor materials and optoelectronic devices and the reliability characterization of devices. In the structure of organic thin film devices, in order to quickly and conveniently characterize the structural performance of the device, the probe station is often used to measure the electrical properties. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/00H01L51/00
Inventor 江潮尹虹李德兴张一伟
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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