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Abnormal Handling Method for Motion Transmission Module of Semiconductor Equipment

A transmission module and exception handling technology, which is applied in semiconductor/solid-state device manufacturing, transportation and packaging, conveyor objects, etc., can solve problems such as difficult capture and processing, and achieve the effect of improving processing efficiency

Active Publication Date: 2017-01-25
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Since it is unpredictable how and why the abnormal situation of the transmission module will occur, it becomes more difficult to catch the exception and deal with it accordingly

Method used

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  • Abnormal Handling Method for Motion Transmission Module of Semiconductor Equipment
  • Abnormal Handling Method for Motion Transmission Module of Semiconductor Equipment
  • Abnormal Handling Method for Motion Transmission Module of Semiconductor Equipment

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Embodiment Construction

[0026] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.

[0027] figure 1 It is a block diagram of the exception handling system of the semiconductor motion transmission module of the present invention; figure 2 It is a flow chart of the exception handling method of the semiconductor motion transmission module of the present invention, which will be combined below figure 1 and figure 2 The present invention will be described in detail.

[0028] The exception handling system of the movement transmission module of semiconductor equipment includes an exception handling module 10 , which includes a capturing and position...

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Abstract

The invention discloses a handling method of abnormalities of movement transmission modules of a semiconductor device. The handling method is used for capturing and handling abnormalities of all movement transmission modules in the semiconductor device in the operating process. The abnormality handling method comprises the steps of capturing the abnormalities in the operation process and locating the movement transmission modules where the abnormalities happen; providing abnormality information of the movement transmission modules and at least one handling mode corresponding to the abnormality; selecting one handling mode according to trigger signals to handle the abnormality. The invention further provides an abnormality handling system which improves capturing and handling efficiency of the abnormalities in the operating process.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment motion transmission module equipment control, in particular to an exception handling method for a semiconductor equipment transmission module. Background technique [0002] The motion transmission module refers to the module used to transmit materials in semiconductor equipment. During the operation of the equipment, the movement-related parts of the motion transmission module will cause accuracy inaccuracy and command acceptance or feedback errors due to long-term use, which will terminate the transmission operation. At this time, the software control system needs to capture the abnormalities of the moving parts that cause the job to terminate, and release them in time, so that users can understand the abnormal situation and provide certain processing methods. [0003] Since it is unpredictable how and why the abnormality of the transmission module will occur, it becomes more dif...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677G06F11/07
CPCH01L21/67242H01L21/67253
Inventor 魏靖南黄扬君贾轶群钟结实
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD