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Glass substrate absorption tool and method for manufacturing glass substrate

A technology of glass substrate and manufacturing method, which is applied to conveyor objects, furnaces, manual conveying devices, etc., can solve problems such as difficulty in removing impurities, and achieve the effect of inhibiting damage

Inactive Publication Date: 2014-07-09
ASAHI GLASS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, for example, it is difficult to remove impurities in the subsequent cleaning process, which may cause defects in glass substrate products

Method used

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  • Glass substrate absorption tool and method for manufacturing glass substrate
  • Glass substrate absorption tool and method for manufacturing glass substrate
  • Glass substrate absorption tool and method for manufacturing glass substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0076] 〔How to use the suction tool〕

[0077] figure 1 It is a figure which schematically shows an example of the operation|work of taking out the glass substrate W from the polishing apparatus 20 using the glass substrate adsorption tool 10 which concerns on one Embodiment of this invention. Hereinafter, a "glass substrate adsorption tool" is also called a "suction tool".

[0078] When the polishing process performed by the polishing device 20 is completed, the upper table 30 moves upward, and the polished glass substrate W (object to be polished) remains on the polishing pad 42 of the lower table 40 . The operator P uses the suction tool 10 used to suction and transport the glass substrate W to suction and take out each glass substrate W after polishing one by one, and takes out the taken out glass substrate while paying attention not to touch the surface of the glass substrate W with the hand. W is loaded into the storage container 50 .

[0079] The storage container 50 ...

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PUM

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Abstract

The invention provides a glass substrate absorption tool capable of preventing damage of a glass substrate during processing the glass substrate, and a method for manufacturing the glass substrate. The glass substrate absorption tool comprises a flow path 81, an absorption portion 60 absorbing the glass substrate through Van der Waals forces, a pressure control portion 80a changing the liquid pressure in the flow path 81, a sheet material 100 arranged between the flow path 81 and the absorption portion 60 and deforms when the fluid pressure changes to change the absorption force between the flow path 81 and the glass substrate contacted with the absorption portion 60. The method includes grinding the glass substrate, cleaning the glass substrate and detecting the glass substrate. The glass substrate absorption tool is used for conveying the glass substrate.

Description

technical field [0001] The invention relates to a technology for adsorbing a glass substrate. Background technique [0002] The processing of glass substrates in the manufacturing process of glass substrates (for example, the installation of glass substrates to the polishing machine, the removal of the polished glass substrates from the polishing machine, etc.) has conventionally been carried out by the following method 1 to method 3 method to implement. [0003] [Method 1]: Operators manually process glass substrates one by one. [0004] [Method 2]: A method of gripping the inner diameter or the outer diameter using a mechanical chuck (for example, refer to Patent Documents 1 and 2). [0005] [Method 3]: A glass substrate is processed using a glass substrate adsorption tool of a vacuum suction method (for example, refer to Patent Documents 3, 4, and 5). [0006] 【Prior technical literature】 [0007] 【Patent Literature】 [0008] [Patent Document 1] Japanese Patent Laid-...

Claims

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Application Information

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IPC IPC(8): B65G7/12B65G49/06
Inventor 小林雅尚伊势博利松田至林俊彦土屋诚
Owner ASAHI GLASS CO LTD
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