Ultrasonic-assisted micro-imprint forming device and micro-imprint forming method
An ultrasonic-assisted, micro-imprinting technology, applied in the direction of fluid using vibration, can solve the problems of ultrasonic vibration difficult to achieve vibration direction and effective conversion, achieve broad application prospects, reduce equipment manufacturing costs and process implementation difficulties, and improve micro The effect of the imprint forming process and quality
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Embodiment 1
[0025] Embodiment 1: An ultrasonic-assisted micro-imprint forming device provided by the present invention has a structure such as figure 1 shown. Including ultrasonic power source 1, ultrasonic transducer 2, ultrasonic horn 3, porous ultrasonic horn 4, lower punch 5, micro-imprinting mold 7 and upper punch 8, the ultrasonic power source 1 and ultrasonic transducer The ultrasonic transducer 2 is connected in series with the ultrasonic horn 3 and the porous ultrasonic horn 4 through the connecting bolt 9, and the lower end surface of the porous ultrasonic horn 4 is connected to the support leg 10 by a thread, and the support leg 10 Supporting the whole device, the upper end surface of the porous ultrasonic horn 4 is connected to the lower punch 5 through connecting bolts, the workpiece 6 is fixed on the lower punch 5, and the micro-imprinting mold 7 is fixed on the upper punch 8; the ultrasonic power supply 1 is The ultrasonic transducer 2 provides electrical energy, and the u...
Embodiment 2
[0029] Embodiment 2: The present invention also provides a micro-imprint method using the ultrasonic-assisted micro-imprint forming device of Embodiment 1, using the porous ultrasonic horn 4 to convert horizontal ultrasonic vibration into vertical ultrasonic vibration, porous The upper end surface of the ultrasonic horn 4 is used as the radiating surface 12 to support the micro-imprinting mold 7 through connecting bolts to realize high-frequency resonance; the workpiece 6 and the lower punch 5 are consolidated together through the connecting bolts 9 and the porous ultrasonic horn 4 together Vibrated vertically at high frequency, the micro-imprint mold 7 moves downward to a predetermined position driven by the upper punch 8, and completes the micro-imprint forming process of the workpiece together with the lower punch 5.
[0030] A specific micro-imprint forming method of an ultrasonic-assisted micro-imprint device at least includes the following steps:
[0031] Step 1, fix the...
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