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Manufacturing method of one-time programmable device

A manufacturing method, a one-time technology, applied in semiconductor/solid-state device manufacturing, electrical solid-state devices, semiconductor devices, etc., can solve problems such as residual charges or particles, failure of storage units, instability of stored electronics, etc., and achieve the effect of avoiding failure

Active Publication Date: 2016-11-09
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, after processes such as photolithography and etching, charges or particles may remain on the surface of the floating gate, making the storage of electrons in the OTP device unstable in the later use process, and even the memory cell fails.

Method used

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  • Manufacturing method of one-time programmable device
  • Manufacturing method of one-time programmable device
  • Manufacturing method of one-time programmable device

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Embodiment Construction

[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that the drawings are all in a very simplified form and use imprecise ratios, which are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0019] Such as figure 1 Said, the manufacturing method of the one-time programmable device of the present invention comprises the following steps:

[0020] S1. Forming two gates on a substrate to serve as a control gate and a floating gate respectively;

[0021] There are many types of one-time programmable devices. The one-time programmable transistors in series described in this embodiment form two transistors on the substrate 100, one is a control transistor and the other is a read transistor. A source or ...

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Abstract

The invention provides a manufacturing method of a one-time programmable device. Before depositing a dielectric layer on the floating gate, the surface is cleaned with a specific chemical solution to remove the remaining charges or particles on the floating gate after etching. , to obtain a cleaner surface, and this method will not damage the floating gate body. Afterwards, subsequent dielectric layer deposition is performed. In this way, there will be no charges or particles above the floating gate of the one-time programmable device, which avoids failure of the storage unit due to instability of electrons when the floating gate stores electrons.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a manufacturing method of a one-time programmable device. Background technique [0002] As embedded applications become more and more widespread, product security is becoming more and more important. On the one hand, it is to protect the hardware design, and on the other hand, it is also for the safety of the product itself, preventing it from being modified. In an embedded system, all codes and system data are stored inside the FLASH chip. The feature of the FLASH chip is that it can be erased and written many times, and the data will not be lost when the power is turned off. In order to protect the data in the FLASH, more and more FLASH manufacturers provide a special register inside the FLASH: OTP (one time programmable) register, that is, a one-time programmable register. It means that this register can only be programmed once, and it can no longer be modified after programmi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/8247
CPCH01L29/401H01L29/40114H01L21/02068H10B41/00
Inventor 许乐张智侃曹亚民
Owner SHANGHAI HUALI MICROELECTRONICS CORP