High reproducibility optical element surface shape detection support device

Abstract

The invention relates to a support device for surface shape detection of high-reproducibility optical elements, which belongs to the technical field of interference detection of optical elements. It solves the technical problem in the prior art that there is contact pair friction force between the detection support device and the optical element, which causes the detection state of the optical element to be different from the final use state. The support device of the present invention comprises a support plate and the same support unit arranged on the support plate, the support plate is provided with a circular through hole and at least three identical grooves distributed along the circumferential direction of the circular through hole; the grooves are opposite to each other. Four identical flexible hinges are symmetrically and parallelly arranged on the two surfaces of the two surfaces; the support unit includes spherical bosses and two sets of identical bearing structures; the bearing structure includes bearings, pin shafts and pin shaft pressure plates, and the bearings pass through the pin shaft and The pressure plate is fixed on two opposite flexible hinges; the spherical boss is fixed on the outer peripheral surface of the optical element. The support device of the present invention can achieve extremely high surface shape reproducibility and has little influence on the supported optical elements by heat and vibration.

Description

technical field [0001] The invention relates to a high-reproducibility optical element surface shape detection support device, which belongs to the technical field of optical element interference detection. Background technique [0002] With the rapid development and application of high-precision precision optical instruments, the requirements for the imaging quality of the optical system are also getting higher and higher, especially the application of extreme ultraviolet lithography (EUVL), the working wavelength is 13-14nm, the processing of optical components and Detection technology is more demanding than other optical systems. In order to ensure the imaging quality of the optical system, it is very important to accurately detect the surface shape accuracy of the optical element and the wave aberration of the optical system. [0003] The optical element surface shape detection support device mainly uses the support structure of the final application of the optical elem...

AI Technical Summary

Problems solved by technology

This structure can repeatedly disassemble and assemble the optical element during the detection process, but there is contact friction between the supporting device and the optical element, resulting in a difference between the detection state and the final use state of the optical element; in the prior art, the contact surface is generally coated with disulfide Lubricating layer materials such as molybdenum or hardened layer materials such as silicon carbide reduce friction, but even so, the friction coefficient can only reach the order of 0.1, which cannot meet the requirements of achieving ultra-high precision surface convergence

Images