Sensitive element of three-dimensional micro force sensor based on flexible mechanism

Abstract

The invention discloses a sensitive element of a three-dimensional micro force sensor based on a flexible mechanism. The sensitive element of the three-dimensional micro force sensor based on the flexible mechanism comprises flexible UPU branch chains and a spherical structure, wherein the flexible UPU branch chains are of a symmetrical structure. According to the branch chains, two pairs of first round flexible hinges and second round flexible hinges achieve a U pair and are symmetrical, two pairs of symmetrical cantilever beams are connected in parallel to achieve a movable pair, and one pair of flexible hinges of which the incision directions are opposite achieve a U motion pair at the input end. The sensitive element of the sensor comprises the three flexible branch chain structures used for converting acting force to be strain, the three branch chains are vertically arranged to measure force in the three vertical directions, and the spherical structure senses external force needing to be measured and is arranged at the center formed by the branch chains. The structural type of the space 3-UPU flexible parallel mechanism serving as the sensitive element is adopted, and the sensitive element of the three-dimensional micro force sensor has the advantages of achieving three-dimensional decoupling force sensing, being high in flexibility and wide in bandwidth range, and the like. The designed sensitive element of the three-dimensional micro force sensor can be used in the fields such as precision machining, precision measurement, nanoscience and technology, and the like.

Description

technical field [0001] The invention belongs to the field of precision engineering testing, in particular to a precision micro-force measuring device designed using a compliant mechanism, and the designed sensitive element of the micro-force sensor can be used in the fields of precision machining and precision measurement, microelectronics engineering, bioengineering, nanometer science and technology, etc. . Background technique [0002] With the research of precision engineering technology, micro-electromechanical system (MEMS) technology and micro / nano technology, micro-sensor technology has been greatly developed, especially micro-force sensors, which perform detection of micro-contact force during various micro-operations. The realization of hybrid control such as force-displacement or force-vision plays an important role in improving the precision of the micro-operating system. Micro-force sensors have broad application prospects in the fields of observation of microsc...

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Problems solved by technology

However, the structure design of the sensitive

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