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Microwave and plasma interaction device

A plasma and microwave technology, applied in the field of electromagnetic field, can solve the problem of no interaction device and achieve the effect of reducing power loss

Active Publication Date: 2014-08-13
湖南哈工聚能科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that there is no device for the two to meet and interact, and to provide a microwave and plasma interaction device

Method used

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  • Microwave and plasma interaction device

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specific Embodiment approach 1

[0012] Specific implementation mode one: the following combination figure 1 Describe this embodiment mode, the microwave-plasma interaction device described in this embodiment mode, it comprises main waveguide 7, curved waveguide and auxiliary waveguide; Main waveguide 7, curved waveguide and auxiliary waveguide are connected together successively Connected cavity, the pipeline of the curved waveguide is vertical to the main waveguide 7 and the auxiliary waveguide at the same time; the vertical main waveguide 7 and the auxiliary waveguide are parallel to each other;

[0013] A microwave source 1 and a plasma emitter 9 are respectively arranged at both ends of the cavity, wherein the microwave source 1 is located at the end of the secondary waveguide, and the plasma emitter 9 is located at the end of the main waveguide 7, between the microwave source 1 and the curved waveguide Ferrite insulation attenuator 2, directional coupler 3, power matching device 4 and microwave window 5...

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Abstract

The invention discloses a microwave and plasma interaction device, and belongs to the field of electromagnetic fields. The device aims to solve the problem that a device enabling microwaves and plasma to meet and to be in interaction does not exist at present. The device comprises a main waveguide tube, a bent waveguide tube and an auxiliary waveguide tube. The main waveguide tube, the bent waveguide tube and the auxiliary waveguide tube are connected in sequence to form a communicated cavity, and a tube line of the main waveguide tube is perpendicular to the main waveguide tube and the auxiliary waveguide tube at the same time. The vertical main waveguide tube and the auxiliary waveguide tube are parallel to each other. A microwave source and a plasma emitter are arranged at the two ends of the cavity respectively, the microwave source is located at the tail end of the auxiliary waveguide tube, the plasma emitter is located at the tail end of the main waveguide tube, and a ferrite insulation attenuator, a directional coupler, a power matcher and a microwave window are sequentially arranged on the auxiliary waveguide tube between the microwave source and the bent waveguide tube. A plurality of microwave absorbing loads are arranged on a tail end tube line of the main waveguide tube, and a tube line of the main waveguide tube is communicated with a pump source. An H11 wave exciter is arranged at the head end of the main waveguide tube.

Description

technical field [0001] The invention relates to an experimental device capable of realizing the interaction between microwave and plasma under certain conditions and detecting the parameters of the microwave and plasma after the interaction occurs, belonging to the field of electromagnetic fields. Background technique [0002] Plasma is a form of matter mainly composed of free electrons and charged ions. If the gas is continuously heated, the molecules are decomposed into atoms and ionized, forming a "gas" composed of ions, electrons and neutral particles. This state is called plasma. In addition to heating, there are other ways to generate plasma, [0003] Microwaves are radio frequency electromagnetic waves with wavelengths between infrared and UHF. [0004] When the plasma interacts with the microwave, on the one hand, the plasma has a certain ability to absorb and reflect the microwave, and on the other hand, the microwave will also heat the plasma. However, we do not...

Claims

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Application Information

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IPC IPC(8): G01R29/00
Inventor 江滨浩李传雨
Owner 湖南哈工聚能科技有限公司
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