Piezoelectric actuation micro-tensile testing device

Abstract

The invention relates to a piezoelectric actuation micro-tensile testing device and belongs to the field of test of mechanical properties of materials under micro nano dimension in a micro nano electromechanical system. The device comprises a piezoelectric actuation unit, a micro tension sensor, a micro displacement detection unit, a position adjustment unit, an optical microscopic imaging unit and a base. Compared with the prior art, the device has the advantages that the axial deformation and the axial tension of a sample can be simultaneously and directly measured, and the elasticity modulus, the yield strength, the breaking strength and other mechanical property parameters of the sample under the micro dimension can be measured. According to the piezoelectric actuation micro-tensile testing device, the piezoelectric actuation unit, the micro tension sensor, the micro displacement detection unit, the position adjustment unit and the optical microscopic imaging unit are designed by adopting the modularization thought, wherein the commercialized and high-precision micro tension sensor and a high-precision capacitance type displacement sensor are adopted to ensure the measurement accuracy of the axial tension and axial deformation of the sample; the device is simple in structure, low in cost, high in precision and good in smooth upgrading performance.

Description

technical field

[0001] The invention relates to a piezoelectrically driven micro-tensile testing device, which belongs to the field of mechanical performance testing of materials at micro-nano scales in micro-nano electromechanical systems. Background technique

[0002] In MEMS, the study of the mechanical properties of materials at the microscale is helpful for the structural design, function realization and reliability analysis of MEES. However, the research on the mechanical properties of materials at the micro-nano scale is far behind the research on other physical properties such as electrical properties and optical properties. The main reason is that the factors affecting the mechanical properties of materials at the micro-nano scale tend to be diversified. The mechanical properties of materials are affected by the scale effect and micro-processing technology, which cannot be characterized by the corresponding macro-theory. In the micro-nano mechanical test, the chara...

Examples

Embodiment Construction

[0017] Such as Figure 1-Figure 3 As shown, a piezoelectric-driven micro-tensile testing device includes a piezoelectric drive unit 5, a micro-tension sensor 7, a micro-displacement detection unit, a position adjustment unit, an optical microscopic imaging unit and a base 1, and the position adjustment unit It includes a four-degree-of-freedom micro-stage 2 and a three-degree-of-freedom micro-stage 13, the four-degree-of-freedom micro-stage 2 is installed on the left side of the base 1, and the three-degree-of-freedom 13 micro-stage is installed on the right side of the base 1; The electric drive unit 5 is fixed on the four-degree-of-freedom micro-motion stage 2 through the adapter plate 3, the displacement output end of the piezoelectric drive unit 5 is connected to the fixed end of the micro tension sensor 7, and the detection end of the micro tension sensor 7 is connected to the moving end by a bolt 8. The stage 11 and the static stage 12 are installed on the working surfac...

technical field

[0001] The invention relates to a piezoelectrically driven micro-tensile testing device, which belongs to the field of mechanical performance testing of materials at micro-nano scales in micro-nano electromechanical systems. Background technique

[0002] In MEMS, the study of the mechanical properties of materials at the microscale is helpful for the structural design, function realization and reliability analysis of MEES. However, the research on the mechanical properties of materials at the micro-nano scale is far behind the research on other physical properties such as electrical properties and optical properties. The main reason is that the factors affecting the mechanical properties of materials at the micro-nano scale tend to be diversified. The mechanical properties of materials are affected by the scale effect and micro-processing technology, which cannot be characterized by the corresponding macro-theory. In the micro-nano mechanical test, the chara...

Examples

Embodiment Construction

[0017] Such as Figure 1-Figure 3 As shown, a piezoelectric-driven micro-tensile testing device includes a piezoelectric drive unit 5, a micro-tension sensor 7, a micro-displacement detection unit, a position adjustment unit, an optical microscopic imaging unit and a base 1, and the position adjustment unit It includes a four-degree-of-freedom micro-stage 2 and a three-degree-of-freedom micro-stage 13, the four-degree-of-freedom micro-stage 2 is installed on the left side of the base 1, and the three-degree-of-freedom 13 micro-stage is installed on the right side of the base 1; The electric drive unit 5 is fixed on the four-degree-of-freedom micro-motion stage 2 through the adapter plate 3, the displacement output end of the piezoelectric drive unit 5 is connected to the fixed end of the micro tension sensor 7, and the detection end of the micro tension sensor 7 is connected to the moving end by a bolt 8. The stage 11 and the static stage 12 are installed on the working surfac...

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