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Functional device, electronic apparatus, and moving object

A technology of functional components and moving bodies, applied in microelectronic microstructure devices, microstructure devices composed of deformable elements, instruments, etc., can solve problems such as damage to movable electrode parts and fixed electrode parts

Inactive Publication Date: 2015-01-21
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the physical quantity sensor of Patent Document 1, for example, when an excessive acceleration is applied, the movable electrode part collides with the fixed electrode part, and the movable electrode part and the fixed electrode part may be damaged.
In addition, in the physical quantity sensor of Patent Document 1, since the potential of the movable electrode part is different from that of the fixed electrode part, when the movable electrode part is displaced, the movable electrode part may stick to the fixed electrode part. sex

Method used

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  • Functional device, electronic apparatus, and moving object
  • Functional device, electronic apparatus, and moving object
  • Functional device, electronic apparatus, and moving object

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0066] 1.1 Functional components

[0067] First, the functional elements according to the first embodiment will be described with reference to the drawings. figure 1 In order to schematically show a plan view of the functional element 100 according to the first embodiment. figure 2 , To schematically show the edge of the functional element 100 according to the first embodiment figure 1 A cross-sectional view along the line II-II.

[0068] In addition, for ease of explanation, in figure 1 In the figure, the cover 90 is shown in perspective. In addition, in figure 1 Here, as three axes orthogonal to each other, the X axis (first axis), the Y axis (second axis), and the Z axis are illustrated. Hereinafter, the origin of the X axis, the Y axis, and the Z axis is the center of the movable body 20 (for example, the center of the movable body 20 on a plane) O. In addition, below, let the first direction along the first axis be the -X axis direction, and the second direction along the se...

no. 2 approach

[0153] 2.1 Functional components

[0154] Next, the functional elements according to the second embodiment will be described with reference to the drawings. Figure 8 In order to schematically show a plan view of the functional element 400 according to the second embodiment.

[0155] Hereinafter, in the functional element 400 according to the second embodiment, components having the same functions as the structural components of the functional element 100 according to the first embodiment are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

[0156] In the functional element 400, such as Figure 8 As shown, the first opposing portion 61 a is located on the +Y axis direction side of the first movable electrode finger 51 and opposes the first movable electrode finger 51. That is, the first opposed portion 61a has a first portion 161 and a second portion 261, and the first portion 161 is located on the -X axis direction side of the first movable ele...

no. 3 approach

[0172] Next, the electronic device according to the third embodiment will be described with reference to the drawings. The electronic device according to the third embodiment includes the functional element according to the present invention. Hereinafter, an electronic device including the functional element 100 as the functional element according to the present invention will be described.

[0173] Picture 10 In order to schematically show a perspective view of a portable (or notebook) personal computer 1100 as an electronic device according to the third embodiment.

[0174] Such as Picture 10 As shown, the personal computer 1100 is composed of a main body 1104 having a keyboard 1102 and a display unit 1106 having a display unit 1108. The display unit 1106 is supported so as to be rotatable relative to the main body 1104 via a hinge structure.

[0175] The functional element 100 is built in such a personal computer 1100.

[0176] Picture 11 In order to schematically show a perspe...

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PUM

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Abstract

A functional device includes a movable body displaceable along a first axis, a fixed section configured to support the movable body in a coupling section, a movable electrode section extending from the movable body, a fixed electrode section arranged to be opposed to the movable electrode section, and an extending section extending from the fixed section and including an opposed section opposed to a side surface of the movable electrode section. The distance between the opposed section and the movable electrode section is smaller than the distance between the fixed electrode section and the movable electrode section.

Description

Technical field [0001] The invention relates to a functional element, electronic equipment and a mobile body. Background technique [0002] In recent years, a physical quantity sensor (functional element) has been developed that uses, for example, silicon MEMS (Micro Electro Mechanical Systems) technology to detect physical quantities such as acceleration. [0003] For example, Patent Document 1 describes a physical quantity sensor including: a movable body which is provided above a substrate; a movable electrode part which extends from the movable body; and a first fixed electrode part which is provided On one side of the movable electrode portion; the second fixed electrode portion, which is provided on the other side of the movable electrode portion, the physical quantity sensor is respectively for the electrostatic capacitance between the movable electrode portion and the first fixed electrode portion, The electrostatic capacitance between the movable electrode portion and the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
CPCB81B3/0021B81B3/0013B81B3/0051B81B2201/0235B81B2201/0242
Inventor 田中悟
Owner SEIKO EPSON CORP