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Installation and adjustment method of vacuum ultraviolet plane grating dispersive spectrometer

A technology of vacuum ultraviolet light and plane grating is applied in the field of spectroscopy, which can solve the problems of high installation and adjustment cost, difficulty in precise adjustment, and reduced installation and adjustment accuracy, and achieves the effects of low cost, high precision, and less labor and time consumption.

Inactive Publication Date: 2017-01-11
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the problem that the vacuum ultraviolet planar grating spectrometer is difficult to be accurately installed and adjusted in the atmosphere, the installation cost is high, and the traditional method is easy to cause diffraction of the installed wavelength during the installation and adjustment, which leads to a serious decline in the installation and adjustment accuracy. It is suitable for the installation and adjustment method of the vacuum ultraviolet grating dispersive spectrometer, and realizes the high-precision adjustment ability of the vacuum ultraviolet grating spectrometer in the atmospheric visible light band, thereby saving the installation cost and improving the adjustment accuracy

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  • Installation and adjustment method of vacuum ultraviolet plane grating dispersive spectrometer
  • Installation and adjustment method of vacuum ultraviolet plane grating dispersive spectrometer
  • Installation and adjustment method of vacuum ultraviolet plane grating dispersive spectrometer

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Embodiment Construction

[0016] The implementation of the method of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0017] Such as figure 1 As shown, the vacuum ultraviolet grating 12 - 4 is replaced by a plane mirror 3 in the spectrometer 12 , and the spectrometer 12 is irradiated by the collimated light emitted by the Zygo interferometer 1 . First adjust the telescope 12-1 in the spectrometer 12, the slit 12-2 and the collimating mirror 12-3, so that the outgoing light of the collimating mirror 12-3 is a collimated light; then adjust the plane mirror 3 to follow the collimated light along the original optical path Return to Zygo Interferometer 1. The computer control processing system 2 is connected with the Zygo interferometer 1 to observe the wave aberration and fine-tune the front-end optical components, and obtain the optimal wave aberration image of the system through the computer control processing system 2 to complete the insta...

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Abstract

The method for installing and adjusting the vacuum ultraviolet grating dispersion spectrometer belongs to the field of spectrum technology. In order to solve the problem that the accuracy of the vacuum ultraviolet grating spectrometer is lowered during the installation and adjustment, the method uses an interferometer as a light source, and uses a plane mirror to carry out the vacuum ultraviolet grating in the original optical path. Instead, adjust the telescopic system, collimation system and slit of the spectrometer in sequence through the system wave aberration interferogram; then replace the plane mirror with a visible light grating, and use the mercury lamp and collimation system to build the characteristic spectral collimation of the parallel mercury lamp Light is the light source for installation and adjustment, calculate the ideal spectrum of the image plane of the system in the vacuum ultraviolet band, and calculate the characteristics of the corresponding mercury lamp according to the ratio of the reticle density of the replaced visible light grating to the vacuum ultraviolet grating of the vacuum ultraviolet spectrometer to be adjusted The vacuum ultraviolet wavelength of the spectrum, record the position of each vacuum ultraviolet spectral line corresponding to the characteristic spectrum of the mercury lamp on the image plane, and adjust the grating and focusing mirror in turn, so that the position of the characteristic spectral line of the mercury lamp falls to the best position obtained by calculation superior.

Description

technical field [0001] The invention relates to a method for installing and adjusting a vacuum ultraviolet plane grating dispersion spectrometer, which belongs to the field of spectrum technology. Background technique [0002] Vacuum ultraviolet planar grating spectrometer plays an indispensable role in the field of atmospheric remote sensing, spectral analysis and performance testing of standard far ultraviolet light sources. But for the vacuum ultraviolet grating spectrometer, since the radiation in the vacuum ultraviolet band is completely absorbed in the atmosphere, it cannot be installed and adjusted under the condition of visible light environment, and when the spectral bandwidth requires very high precision, small adjustment errors will be The performance of the spectrometer is greatly affected, so the difficulty and complexity of the installation and adjustment have brought great difficulties to the integrated application of the vacuum ultraviolet grating spectromete...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/28
Inventor 王淑荣于磊林冠宇
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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