Optical device for rapid centering assistance using axial chromatic aberration
A technology of axial chromatic aberration and optical devices, applied in the direction of using optical devices, optics, measuring devices, etc., can solve problems such as low efficiency, achieve the effects of saving processing and manufacturing costs, reducing processing accuracy requirements, and improving centering efficiency
Active Publication Date: 2017-04-05
BEIJING GUOWANG OPTICAL TECH CO LTD
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Problems solved by technology
[0005] The present invention is to solve the technical problem that the calibration method of the optical axis of the interval measuring instrument and the rotating shaft of the integrated platform in the prior art adopts the method of repeated testing and iterative convergence is very low in efficiency, and proposes an optical device that uses axial chromatic aberration for rapid auxiliary centering
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[0014] Such as figure 1 , 2 As shown, the optical device for rapid auxiliary centering by using axial chromatic aberration includes the probe head assembly 1 of the centering instrument, the measuring head 3 of the spacer measuring instrument, the spacer lens group to be measured 4 and the high-precision air bearing turntable 5, and the probe head assembly of the centering instrument 1. The measuring head 3 of the distance measuring instrument and the spacer lens group 4 to be measured are arranged coaxially from top to bottom. Auxiliary centering device 2 is set between the distance mirror groups 4 to be measured, and the mirror group composed of eccentricity monitoring lens 21 and tilt monitoring lens 22 in the auxiliary centering device 2 is arranged on the four-dimensional adjustment frame 23, and the measuring head 3 of the distance measuring instrument is coaxial It is arranged at the lower end of the mirror group in the auxiliary centering device 2 .
[0015] The opti...
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An optical device for quick auxiliary centering utilizing axial chromatic aberration, the device comprising a centering instrument detection head assembly (1), an interval measurement instrument measurement head (3), an interval lens group (4) to be measured and a high-precision air-floating rotation table (5); the centering instrument detection head assembly (1), the interval measurement instrument measurement head (3) and the interval lens group (4) to be measured are coaxially disposed from top to bottom; an optical axis of the interval lens group (4) to be measured coincides with a rotation shaft of the high-precision air-floating rotation table (5); an auxiliary centering device (2) is disposed between the centering instrument detection head assembly (1) and the interval lens group (4) to be measured; a lens group consisting of an eccentric monitoring lens (21) and an inclined monitoring lens (22) in the auxiliary centering device (2) is disposed on a four-dimensional adjustment frame (23); and the interval measurement instrument measurement head (1) is coaxially disposed at a lower end of the interval lens group (4). The optical device belongs to the technical field of integration fitting in optical systems, and is particularly suitable for quickly calibrating an optical axis of a test instrument and an optical axis of an objective lens, thus solving the technical problem in the prior art of a low efficiency of a method for calibrating an optical axis of an interval measurement instrument measurement head and a rotation shaft of a integration platform that employs repeated tests and iterative convergence.
Description
technical field [0001] The invention relates to an optical device for rapidly assisting centering when an axial chromatic aberration is used to align an interval / thickness testing instrument with an optical axis of a measured object, and belongs to the technical field of optical system integration and assembly. Background technique [0002] The integrated assembly of high-precision transmissive optical systems must have sub-micron level lens spacing test accuracy, and a non-contact interferometric testing instrument - the spacing measuring instrument must be used, and the optical axis of the spacing measuring instrument and the optical axis of the object to be tested must be guaranteed coincide. This type of interval measuring instrument adopts the Michelson interferometric principle and uses a short coherent light source to achieve sub-micron measurement accuracy. At present, the common practice is to integrate the interval measuring instrument with the high-precision cent...
Claims
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IPC IPC(8): G02B7/00G01B11/14G01B11/06
CPCG01B11/14G02B7/00
Inventor 赵阳刘春来王平李显凌隋永新杨怀江
Owner BEIJING GUOWANG OPTICAL TECH CO LTD