Oscillation control method for micromechanical resonator and micromechanical resonator

Abstract

The invention discloses an oscillation control method for a micromechanical resonator and the micromechanical resonator. The micromechanical resonator comprises a substrate, and an oscillation structure and a driving structure which are arranged on the substrate. The driving structure is used for driving the oscillation structure of the micromechanical resonator to move in a reciprocating way, generating facilitating electrostatic force which is applied to the oscillation structure and facilitates reciprocating movement of the oscillation structure when the oscillation structure moves in the reciprocating way, and generating restricting electrostatic force which is applied to the oscillation structure and restricts reciprocating movement of the oscillation structure so that frequency deviation generated by the softening effect of an electrostatic spring and frequency deviation generated by the hardening effect of the electrostatic spring in reciprocating movement of the oscillation structure can be mutually cancelled, and thus the micromechanical resonator is controlled to work at the inherent frequency and work stability of the micromechanical resonator is enhanced.

Description

technical field [0001] The invention relates to the technical field of resonators, and more specifically, relates to a vibration control method of a micromechanical resonator and the micromechanical resonator. Background technique [0002] Micro Electro Mechanical System (MEMS) technology is a combination of sensor, computer, excitation, control, communication, energy consumption and other technologies. In the process of design and production, the combination of micromachining technology and integrated circuit manufacturing technology must be considered. , electronic control, thermodynamic effects, circulation effects, magnetic fields, optical effects, etc., MEMS technology has developed rapidly in recent years. [0003] As a part of MEMS technology, the design and research of micromechanical resonators is very necessary. Its characteristic is that it can be used as a substitute for crystal oscillators, integrated with microcircuits on a chip, and can directly output frequen...

AI Technical Summary

Problems solved by technology

[0004] Micromechanical resonators are mainly divided into several driving methods such as electrostatic drive, piezoelectric drive, and magnetic drive. In the existing piezoelectric-driven micromechanical resonators, as long as the electrostatic force acts on the vibrating structure, it will affect the entire vibrating structure. This phenomenon is called the electrostatic spring softening effect (electro-static spring softening) and the electrostatic spring hardening effect (electro-static spring hardening), which respectively correspond to the decrease and increase of the stiffness of the vibrating structure, which in turn will change the resonator operating frequency, causing additional drift in resonator performance

Images