Peeling apparatus and peeling method
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
- Publication Date
- 2015-02-11
- Estimated Expiration
- Not applicable Β· inactive patent
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The present disclosure generally relates to a peeling device and a peeling method, and in particular, to a device and a peeling method for peeling a flexible substrate from a layer bonded thereto. Background technique
[0002] Usually, the flexible substrate 1 and the glass substrate 2 are bonded together through the release layer 3, such as figure 1 As shown, in order to peel off the flexible substrate from the glass substrate, the current method is laser lift-off (Laser lift-off). figure 2 As shown, the laser L is used to scan the release layer material between the flexible substrate 1 and the glass substrate 2, and high energy is given to break the bond between the release layer 3 and the flexible substrate 1 and destroy the bond between the flexible substrate 1 and the release layer 3. bonding, so that the flexible substrate 1 is peeled off.
[0003] Since laser scanning is required, the glass process is very time-consuming. In addition, the cos...