Substrate checking device and method
A substrate inspection and substrate technology, which is used in measurement devices, image data processing, television, etc., can solve the problems of reduced qualification rate of special-shaped substrates, failure of display equipment, and inability to inspect special-shaped substrates, and achieve the effect of accurate judgment.
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[0022] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0023] like figure 1 As shown, an embodiment of the present invention provides a substrate inspection device, which includes: an area scan camera 1 , a line scan camera 2 , a light source 3 , and a transfer table 4 .
[0024] Wherein, the transfer platform 4 is used to carry the substrate 5 on its surface.
[0025] Optionally, the transfer table 4 may be a circular rotary table.
[0026] Wherein, the area scan camera 1 is located on the first side of the transfer table 4 and is set opposite to the surface, and is used for checking the standard specification of the substrate 5 .
[0027] Wherein, the line scan camera 2 is located on the first side of the transfer table 4 , opposite to the surface, and is used for inspecting the edge line and size of the substrate 5 .
[0028] Wherein, the light source 3 is located on the second side opposite to the ...
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