A sample chamber structure of a vacuum coating system
A vacuum coating and sample chamber technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of difficult control of coating deposition shape and adjustment, achieve high shape accuracy and ensure movement The effect of precision
Active Publication Date: 2017-10-13
SHANDONG UNIV
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Problems solved by technology
However, it is more difficult to control the shape of the coating deposition in this scheme. The specific reason is that the control of the deposition shape of the coating is by adjusting the relative positions of the two masks, and it also depends on the shape of the mask hole. Realize the change of simple shape, it is difficult to realize the adjustment of complex coating deposition shapes such as rings and ellipses
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[0047] Example: such as figure 1 Shown: a sample chamber structure of a vacuum coating system, including: a vacuum chamber 5, the top of the vacuum chamber 5 is connected to the reference plate 2 by bolts, and the contact surface of the vacuum chamber 5 and the reference plate 2 has a good surface roughness degree, several threaded holes (blind holes) are evenly distributed on the reference plate 2; There is a substrate 4; the mask support 1 is also fixed on the reference plate 2 by the same bolts, and the mask support 1 has a mask installation hole 6-1; when the mask support 1 is installed, the reference plate 2 is also used as a positioning reference, To ensure that the distance from the inner surface of the mask holder 1 to the reference plate 1 meets the design requirements.
[0048] In this solution, the vacuum nanopositioning platform 3 is in direct contact with the reference plate 2, and the reference plate 2 is in direct contact with the vacuum cavity 5. According to ...
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Abstract
The invention relates to a sample chamber structure of a vacuum coating system, comprising: a vacuum chamber, the top of which is fixedly connected with a reference plate; a plurality of positioning holes are evenly distributed on the reference plate; installed on the lower surface of the reference plate A vacuum nanopositioning platform, the vacuum nanopositioning platform transfers heat to the cavity wall of the vacuum chamber through the reference plate; the vacuum nanopositioning platform is equipped with a substrate; the vacuum nanopositioning platform is provided with a mask bracket below the mask bracket It is fixedly connected with the reference plate, and the mask holder has a mask installation hole; the side of the vacuum cavity is provided with a laser ruler light path and a plurality of functional interfaces; the vacuum cavity also has a cavity door. The invention realizes the coating deposition of specific shape by designing a brand-new sample chamber structure.
Description
technical field [0001] The invention relates to the field of vacuum coating, in particular to a sample chamber structure of a vacuum coating system. Background technique [0002] Thin film is a form of matter, and it uses a wide range of film materials, which can be simple elements or compounds, or inorganic materials or organic materials. Thin films, like bulk materials, can be monocrystalline, polycrystalline, or amorphous. In recent years, functional material films and composite films have also made great progress. Coating technology and thin film products are widely used in industry, especially in the field of electronic materials and components industry. Film (or coating) methods can be divided into gas phase generation method, oxidation method, ion implantation method, diffusion method, electroplating method, coating method and liquid phase growth method. Vapor phase generation method can be divided into Physical Vapor Deposition (Physical Vapor Deposition) referred...
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IPC IPC(8): C23C14/24C23C14/50
Inventor 闫鹏卢松松张震
Owner SHANDONG UNIV