The Method of Using Movable Reticle to Realize Datum Transformation
A technology of benchmark conversion and reticle, applied in the field of optics, can solve the problems of decreased measurement accuracy, inconvenient distinction between two graphics, inability to distinguish, etc., to ensure measurement reliability, simple conversion process, and true and reliable measurement accuracy Effect
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Embodiment 1
[0032] Laser autocollimators with movable reticles for fiducial conversion, e.g. figure 1 As shown, it includes a collimating objective lens 1, a spectroscopic module 2, a reticle 3, an image detection module 4, and a laser adjustment module 5. The collimating objective lens 1 is placed at the front end of the spectroscopic module 2; Between the rear end of the straight objective lens 1 and the front end of the light splitting module 2, and the reticle 3 can move back and forth along the optical axis of the collimating objective lens 1; the laser adjustment module 5 is placed at the rear end of the light splitting module 2, and the image detection module 4 is connected with the light splitting module 2.
[0033] Further, in order to better realize the laser autocollimator using a movable reticle to realize benchmark conversion according to the present invention, it also includes a laser 6, the light outlet of the laser 6 and the light inlet of the laser adjustment module 5 c...
Embodiment 2
[0038] The method for realizing benchmark conversion by using a movable reticle, using a laser autocollimator to realize benchmark conversion by using a movable reticle, comprises the following steps:
[0039] Step A, benchmark establishment: turn on the power of the laser autocollimator, start the control software, and place the reticle 3 on the convergence point of the fine alignment pattern after the beam expansion and focusing;
[0040] Step B. Datum conversion: the software samples the center of mass position at least twice at the convergence point of the fine alignment graph, the software calculates the average value of the centroid position and displays the datum point, and generates a crosshair as an alternative datum point, and uses this The center point of the cross hair is placed at the average position of the centroid;
[0041] Step C. Disappearance of the reference point: move the reticle axially through the control software to make the reference point disappear. ...
Embodiment 3
[0044]This embodiment is further optimized on the basis of the above-mentioned embodiments. In order to better realize the method of using a movable reticle to realize reference conversion in the present invention, the laser emitted by the laser autocollimator is reflected by the external mirror 7 , and form a bright spot through the collimating objective lens 1, the coordinates of the real-time display of this bright spot are X2 and Y2, and the distance between the alternative reference point and the reference point is D, and In the formula, L is the size of the pixel; the angle error between the external reflector and the optical axis is obtained by dividing the D value by the system focal length of the laser autocollimator.
[0045] For example, observe with CCD, if the pixel of CCD is 10um, L=10um, (X1, Y1)=(512.0, 512.0), (X2, Y2)=(572.5, 561.3), use the formula to calculate D=780.43 um, that is, the distance between the reference and the reflected image point is 780.43u...
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