Cubic crystal boron nitride sintered body cutting tool and manufacturing method thereof
A cubic boron nitride and cutting tool technology, applied in the field of cubic boron nitride sintered body cutting tools and their manufacturing, can solve the problems of low adhesion strength, shortened tool life, easy tool tip damage, etc., and improve wear resistance. sexual effect
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[0059] Production of cBN particles as raw material powder:
[0060] Using cBN particles with an average particle size of 0.5 to 8.0 μm as the substrate, the ALD method (Atomic Layer Deposition: which is to make the molecules of the raw material compound react layer by layer on the substrate in the vacuum chamber and repeat the raw material by Ar and nitrogen) A method of forming a film by purging the compound, which is a kind of CVD method) It is coated with TiO to form a thin layer 2 Floor. More specifically, cBN particles with an average particle size of 0.5 to 8.0 μm are loaded into the furnace, and the temperature in the furnace is raised to 350° C., and Ti[N(CH 3 ) 2 ] 4 , and using H as the reactive gas 2 O, the following (1) to (4) is regarded as one cycle, and this cycle is repeated until the target layer thickness is reached, so that the surface of the cBN particle is coated with TiO with a predetermined layer thickness. 2 Floor.
[0061] (1)Ar+Ti[N(CH 3 ) 2 ]...
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