Novel piezoelectric pump

Abstract

A piezoelectric pump is a revolutionary product of a micro pump manufacturing technology. The piezoelectric pump is simple in structure, small in size, low in weight and low in energy consumption, and causes no noise and no electromagnetic interference. When a ceramic wafer with the periphery supported and fixed deforms, the ceramic wafer needs to overcome a limit of a support on deformation of the ceramic wafer firstly, and energy needed by the ceramic wafer to perform deformation movement is large and deformation quantity of the ceramic wafer is small, and therefore output flow is low, and furthermore efficiency is low. The invention mainly aims at designing a novel piezoelectric ceramic driving piezoelectric ceramic pump which overcomes defects in work of the piezoelectric pump and achieves the purpose of using small energy to obtain high output flow and pressure. The novel piezoelectric ceramic driving piezoelectric ceramic pump is mainly characterized by comprising a piezoelectric vibrator, wherein one end of the piezoelectric vibrator is fixed on a housing or the center of the piezoelectric vibrator is fixed, and other portions of the piezoelectric vibrator are suspended in a cavity and form a cantilever type support. By adopting the above mode, large flexural deformation is generated at the front end of the piezoelectric vibrator, and simultaneously the piezoelectric vibrator is low in resonant frequency. Furthermore, a crack between the periphery of the piezoelectric vibrator and the housing is sealed by a one way seal ring so as to form a double cavity pump, or a space between the periphery of the piezoelectric vibrator and the housing can be sealed by an elastic membrane structure so as to form a typical single cavity pump.

Description

Technical field [0001] The invention belongs to the field of microelectronic fluid machinery, and can be used for micro liquid or gas driven pumps in the technical fields of medical equipment, bioengineering, micro equipment, etc. Specifically, the piezoelectric vibrator is deformed by using the inverse piezoelectric effect of piezoelectric ceramics. A micropump manufacturing technology that realizes fluid output by changing the volume of the pump chamber through deformation. Background technique [0002] Piezoelectric pump is a revolutionary product of micro-pump manufacturing technology. Although its invention and development have only a history of more than 20 years, it can be used according to its simple structure, small size, light weight, low energy consumption, no noise, and no electromagnetic interference. Applied voltage or frequency controls the output of small flow, so it has been successfully applied in many fields. In 1978, W.J.Spenser of the Sandia National La...

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Problems solved by technology

However, since the deformation of the ceramic sheet fixed by the surrounding support must first overcome the limitation of the support on the deformation of the ceramic sheet, the energy required for the deformation movement is large and the deformation amount is small, so the output flow rate is low and the efficiency is not high.

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