Inspection device and inspection method
An inspection device and inspection result technology, applied in measurement devices, instruments, opto-mechanical equipment, etc., can solve problems such as high possibility, failure to form exposure patterns normally, and failure to achieve mask clamping.
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no. 1 Embodiment
[0023] Figure 1A is a plan view showing an example of the electrostatic chuck holding mechanism, Figure 1B It is a side view showing an example of a state where the electrostatic chuck holding mechanism holds the mask. The electrostatic chuck holding mechanism 50 has a structure in which a conductive layer 52 is provided on one main surface of a base 51 on a flat plate. In addition, a plurality of protrusions 53 are provided on the surface of the conductive layer 52 . The base body 51 can be made of materials such as glass or ceramics with very small thermal expansion. In addition, a conductive material such as TiN or CrN can be used for the conductive layer 52 having the convex portion 53 .
[0024] The protrusions 53 are arranged two-dimensionally at a predetermined pitch on one main surface of the base 51 . The height h of the convex portion 53 is, for example, 5 to 50 μm, and the diameter of the convex portion 53 is about 1 mm. Moreover, the convex part 53 is arrange...
no. 2 Embodiment
[0045] In the second embodiment, a specific example of a method of obtaining the protrusion contact area and the protrusion non-contact area from the information obtained as a result of the back inspection of the object held by the electrostatic chuck will be described.
[0046] Figure 5 It is a block diagram schematically showing the functional configuration of the electrostatic chuck holding object inspection device according to the second embodiment. The electrostatic chuck contact position acquisition unit 13 of the electrostatic chuck holding object inspection device 10 of the first embodiment of the electrostatic chuck holding object inspection device 10A includes: a function 131 for specifying the actual contact area of a convex part; a function 132 for estimating a contact area of a convex part; The contact area takes function 133 .
[0047] The convex portion actual contact area specifying function 131 selects a plurality of positions estimated to be in contact ...
no. 3 Embodiment
[0066] In the second embodiment, the case where the convex contact area is obtained using the particle diagram and the inspection photograph is exemplified, but in the third embodiment, the case where the convex contact area is obtained using only the particle diagram will be described.
[0067] The electrostatic chuck holding object inspection device of the third embodiment is the same as the device described in the second embodiment. However, the inspection result information acquisition unit 12 acquires only the particle diagram from the inspection unit 11 as the inspection result information.
[0068] In addition, the function 131 for specifying the actual contact region of the convex part, in the particle map acquired by the inspection result information acquisition unit 12, calculates the regular area using the least square method or Fourier transform, for example, from the area where the particles have regular positions selected by the inspector. As for the particle pit...
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Abstract
Description
Claims
Application Information
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