Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor

Abstract

The invention provides a co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for a linear motor. The platform comprises X / Y-direction bases, X / Y-direction guide rails, sliders, U-shaped linear motor stators, a macro movement rotor, a micro movement rotor and a macro and micro integration platform body, wherein a macro movement platform body and a micro movement platform body are connected through an elastic component to form the integration platform body, a stator installed on the X-direction base is shared by a rotor of the macro movement platform body and a rotor for controlling the X-direction micro movement of the micro movement platform body, precision displacement compensation is performed in the Y direction through piezoelectric ceramic or a decoupling voice coil motor, and when the macro and micro rotors are driven at the same time, overall high-speed movement within a large range can be achieved; when movement deviation occurs, because the micro movement platform body is small in inertia and free of friction, precision displacement output is achieved through elastic deformation, and independent drive can be performed so that high-frequency movement deviation compensation can be achieved. Due to composite movement control, two-dimensional high-speed precision movement can be achieved, an installing and using mode is consistent with that of a traditional platform, and application and popularization are facilitated.

Description

technical field [0001] The invention relates to a precision motion platform, in particular to a linear motor common stator multi-drive macro-micro integrated high-speed precision motion two-dimensional platform. Background technique [0002] With the advancement of science and technology, people's requirements for products are getting higher and higher, which prompts manufacturers to have higher and higher requirements for product processing accuracy. The strokes of high-precision feed motion platforms in existing equipment are generally shorter, while those with large strokes The accuracy of ordinary macro motion equipment cannot meet the actual needs. If special large-stroke high-precision motion equipment is used, the manufacturing cost of the product will increase significantly. In view of the above status quo, a multi-directional motion platform that can combine macro motion with large stroke and general precision and micro motion with high precision and small stroke ca...

AI Technical Summary

Problems solved by technology

[0002] With the advancement of science and technology, people's requirements for products are getting higher and higher, which prompts manufacturers to have higher and higher requirements for product processing accuracy. The travel of high-precision feed motion platforms in existing equipment is generally shorter, while the travel of large The accuracy of ordinary macro motion equipment cannot meet the actual needs. If special large-stroke high-precision motion equipment is used, the manufacturing cost of the product will increase significantly

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