A microstructure array precision machining machine tool with adaptive matching of dynamic characteristics

Abstract

A microstructure array precision processing machine tool with adaptive matching of dynamic characteristics, including a Y-direction movement mechanism, an X-direction movement mechanism and a Z-direction precision stamping mechanism, the X-direction movement mechanism is fixed on the base through an X-direction bracket, and the Z The X-direction precision stamping mechanism is installed on the X-direction rail of the X-direction movement mechanism through the X&Z linkage platform and the X&Z composite guide rail slider, and realizes the X-direction movement under the X-direction drive of the X-direction movement mechanism; the workpiece is placed on the on the Y-direction motion platform of the Y-direction motion mechanism, and realize the Y-direction motion through the Y-direction motion mechanism. The Z-direction precision stamping mechanism can fine-tune the dynamic characteristics according to different stamping frequencies to obtain consistent dynamic response performance, and can realize position-force switching compound control to achieve consistent processing of microstructure arrays. The invention proposes a precision micro stamping machine tool which shortens alignment time, reduces motion deviation, and improves processing efficiency and processing accuracy.

Description

Technical field [0001] The invention relates to a precision motion platform, in particular to a microstructure array precision processing machine tool with adaptive dynamic characteristics matching. Background technique [0002] In the field of semiconductor packaging, it is often necessary to process some precision microstructures on the workpiece. Precision stamping machine is a processing equipment that completes the above-mentioned procedures. The current problems of stamping equipment include: (1) the stamping accuracy of the stamping machine is limited; (2) the processing efficiency of the stamping machine is not high; (3) the process adjustment of the stamping equipment is more complicated. In the prior art micro-stamping machine tool, a Z-direction precision stamping mechanism is set on the conventional XY platform. In the Z-direction precision stamping mechanism, piezoelectric ceramic actuators and elastic devices are used to drive the micro-stamping head to process a m...

AI Technical Summary

Problems solved by technology

The problems existing in the current stamping equipment are: (1) the stamping precision of the stamping machine is limited; (2) the processing efficiency of the stamping machine is not high; (3) the process adjustment of the stamping equipment is relatively complicated

Because the existing technical solution is to add a Z-direction precision stamping mechanism on the conventional XY platform, the overall structure is relatively cumbersome

In addition, the position control system is adopted for the Z-direction movement in the existing technical scheme, and the stamping force changes greatly during the contact stamping stroke of the stamping head with the workpiece, and the displacement control method will lead to limited actual stamping accuracy

However, in order to achieve high stamping precision, the existing technical solutions often require a more complex process adjustment process, and usually sacrifice processing efficiency

Images