Method and device for testing secondary electron emission coefficient of materials at all incident angles

Abstract

The invention provides a method and a device for testing a secondary electron emission coefficient of a material under all incidence angles. The method comprises the following steps: step 1, arranging a to-be-tested sample onto a sample table in a vacuum cavity, vacuumizing the cavity, and arranging an electron collection device which is adopted as a collection part and is a quarter of a spherical shell in an upper half space; step 2, rotating the sample table, enabling the to-be-tested sample to incline for a needed test angle theta, testing current flowing by the electron collection device and marking as I1; step 3, rotating the sample table, enabling the to-be-tested sample to incline in an opposite direction for an angle theta, testing the current, and marking the current as I2; step 4, maintaining the to-be-tested sample stationary, rotating the electron collection device to the lower half space, testing the current, and marking the current as I3; step 5, testing incidence electron current, and marking the incidence electron current as Ip, and obtaining the secondary electron emission coefficient delta as (in the specification) under incident angle theta. According to the method and the device, all emitted electrons can be collected by changing the sample angle and the angle of the collection device. The method and the device have the advantages of precision in test result and simplicity in operation.

Description

technical field [0001] The invention belongs to the field of physical electronics, and in particular relates to a method and a device for testing the secondary electron emission coefficient of materials at all incident angles. Background technique [0002] The secondary electron emission characteristics of materials are not only an important parameter to characterize the microdischarge of high-power microwave components of space vehicles, but also an important basis for material selection, analysis and design of high-power microwave components of space vehicles. The test of secondary electron emission characteristics is of great significance for studying the physical mechanism of secondary electron emission, accurately predicting the microdischarge threshold and optimizing the method of microdischarge suppression. The test of secondary electron emission characteristics under different incident angles helps to accurately predict the micro-discharge threshold and evaluate the ...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is: to provide a new test method for the secondary electron emission coefficient, which has the advantages of accurate test results and simple and easy operation, so as to overcome the difficulties in the operation of the global collector and the hemispherical collector in the prior art. Part of the electrons in the collection pole cannot be collected, and the application of bias voltage will affect the test results, etc.

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