Silicon-based waveguide-improved silicon dioxide-based array waveguide grating device and manufacturing method thereof

Abstract

The invention discloses an improved silicon dioxide-based array waveguide grating and a manufacturing method thereof. The silicon dioxide-based array waveguide grating comprises input waveguides, output waveguides, slab waveguides, and an array waveguide with an adjacent length difference, wherein each of the input waveguides and the output waveguides comprises a silicon dioxide-based waveguide part and a silicon-based waveguide part which are connected through a second coupler; the silicon-based waveguide parts of the input or output waveguides are connected with a Rowland circle of the silicon dioxide-based slab waveguides through first couplers; the second couplers for connecting the silicon-based waveguides with the silicon dioxide-based waveguides are positioned at enough distances after the input or output waveguides of the silicon-based waveguides are gradually separated; the channel spacing of the silicon-based array waveguide grating is in direct proportion to the intervals of the input or output waveguides; in order to avoid crosstalk caused by coupling between the input or output waveguides as much as possible, enough distances between the input or output waveguides are required for decoupling; the input or output waveguides of the silicon dioxide-based array waveguide grating are replaced with the silicon-based waveguides so as to reduce the channel spacing thereof. The silicon dioxide-based array waveguide grating has the advantages of mature process, simplicity in operation, low cost and the like.

Description

technical field [0001] The invention belongs to the field of wavelength division multiplexing in optical fiber communication, relates to silica-based and silicon-based waveguides, in particular to a device and a manufacturing method of a silica-based arrayed waveguide grating improved by using silicon-based waveguides. Background technique [0002] In modern optical communication systems, people's requirements for information transmission rate and device integration are increasing day by day. Arrayed waveguide gratings are typical integrated dense wavelength division multiplexing devices, which are composed of input and output waveguides, slab waveguides and arrayed waveguides. It can make multiple wavelengths of light mixed together for transmission, and can be separated according to the wavelength after reaching the end point, which greatly improves the transmission capacity of the optical fiber and is easy to integrate [1,2]. After a long period of development, silica-ba...

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Problems solved by technology

[0012] The object of the present invention is, in order to solve the problem of poor wavelength resolution of silica-based arrayed waveguide gratings, to propose a device and manufacturing method of silica-based arrayed waveguide gratings improved by using silicon-based waveguides

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