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Preparation method of photon-guiding single-photon source

A single-photon source and directional technology, applied in the structure of the active region, nano-optics, nano-technology, etc., can solve the problem that the theoretical value is far away, the precision of the focused ion beam is limited, and the single-photon collection and utilization efficiency of the diamond hemispherical lens can be solved. There are still issues to be raised, so as to achieve the effect of smooth surface, simple manufacturing process, and improvement of single-photon collection and utilization efficiency.

Active Publication Date: 2018-06-01
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

However, the precision of direct etching with focused ion beams is still limited, and the single-photon collection and utilization efficiency of the diamond hemispherical lens prepared by this scheme is still to be improved, which is far from the theoretical value.
Although the diamond hemispherical lens structure prepared by micro-nano processing technology can reduce the internal reflection of the emitted single photon in the bulk material and effectively improve the collection efficiency, but due to the blocking of the substrate sidewall around the hemispherical structure, a large part of it exits from the hemispherical lens. of single photons still cannot be collected by single photon collectors

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  • Preparation method of photon-guiding single-photon source
  • Preparation method of photon-guiding single-photon source
  • Preparation method of photon-guiding single-photon source

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Embodiment Construction

[0045] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0046] According to one embodiment of the present invention, a method for preparing a photon-guiding single-photon source is provided. The method etches a diamond hemispherical lens containing a color center from the surface of a diamond block. At the same time, the hemispherical A parabolic surface is etched around the shaped lens as a reflective surface, and an anti-reflection metal layer is prepared on the reflective surface to obtain a photon-guiding single-photon source.

[0047] The preparation method of the present embodiment specifically includes the following steps ( Figure 1a ~f shows a schematic diagram of different stages in the preparation method of a photon-guiding single-photon source, and the following step S1 corresponds to Figure 1a , step S2 corresponds to Figure 1b , step S3 corresponds to Figure 1c , steps S4 to S6 correspond t...

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Abstract

The invention provides a method for preparing a photon-guided single-photon source, which includes: positioning the position of the color center in the diamond block; using multiple sets of circular ion beam pattern groups to etch the color center on the surface of the diamond block is the hemispherical surface of the center of the sphere, in each group of annular ion beam pattern groups, the ring centers of each annular ion beam pattern are staggered, the inner circle radii of each annular ion beam pattern are equal, and the outer circle radii of each annular ion beam pattern are equal, And the ring centers of each annular ion beam pattern are evenly distributed on a circle, the inner radius of each group of annular ion beam patterns gradually decreases until approaching 0, and the outer radius of each group of annular ion beam patterns gradually increases, so that the diamond The side wall forming the surrounding hemisphere in the block is a parabola, and the color center is located at the focus of the parabola. The invention can significantly improve the single-photon collection and utilization efficiency of the diamond single-photon source, and enables the diamond single-photon source to have photon guidance.

Description

technical field [0001] The invention relates to the field of micro-nano device processing technology and the field of quantum information technology, in particular, the invention relates to a preparation method of a photon-guiding single-photon source. Background technique [0002] The photon as a quantum entity has played an important role in opening understanding of the quantum world. Among them, a single-photon source capable of emitting a single photon is a major quantum platform. [0003] At present, most of the systems that can controllably emit single photons are single-emitter quantum systems, which include: semiconductor quantum dots, mesoscopic quantum wells, single molecules, single atoms and single ions, and NV color centers (nitrogen substitution in diamond color centers combined with adjacent vacancy defects, hereinafter referred to as color centers), etc. Its operating principle is: when a single photon needs to be emitted, the system enters an excited state...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/34B82Y20/00B82Y40/00
Inventor 李无瑕姜倩晴顾长志
Owner INST OF PHYSICS - CHINESE ACAD OF SCI