High-precision micro-miniature air static-pressure rotary table

Abstract

The invention provides a high-precision micro-miniature air static-pressure rotary table. According to the high-precision micro-miniature air static-pressure rotary table, the problems that as for a current common-use high-precision micro-miniature air static-pressure rotary table, the number of constituting parts is large, the quite high precision requirement can not be met easily, dynamic balance can not be achieved easily, the size of a whole system is large, and particularly, the height is large are solved; the problems that due to the common-use mode of decreasing the overall height of the rotary table, stability is low, and the capacity for bearing the capsizing moment is low are solved; the production cost problem caused when a plurality of working faces of a shaft sleeve and a shaft need to be machined in the rotary table machining production process is solved. The high-precision micro-miniature air static-pressure rotary table comprises a rotary table machine base, a conical air floating shaft sleeve, a main shaft system and a rotary table motor. According to the high-precision micro-miniature air static-pressure rotary table, the working faces, needing to be machined in the rotary table production process, of the shaft sleeve and a shaft are two corresponding conical surfaces, the number of the working faces is decreased to a certain degree compared with the original high-precision micro-miniature air static-pressure rotary table, and the production cost is reduced. The high-precision micro-miniature air static-pressure rotary table has the advantages of being easy to assemble, good in precision retentivity and the like, and can be used on multi-machining-mode precise and ultra-precision machining equipment.

Description

technical field [0001] The invention relates to a high-precision miniature air static pressure turntable, which belongs to the technical field of air static pressure turntables. Background technique [0002] Precision and ultra-precision machining technology is one of the most important parts of the machinery manufacturing industry, which directly has a profound impact on the development of cutting-edge technology and defense industry in each country, and also affects the precision and surface quality of civil machinery products, affecting the International competitiveness of products. In the 1950s, the accuracy level of precision machining could reach 3-5 μm, and the processing accuracy of ultra-precision machining could reach 1 μm. By the late 1970s, the precision level of precision machining could reach 1 μm, and the precision level of ultra-precision machining could reach 0.1 μm; and now the precision level of precision machining can reach 0.1 μm, and the processing acc...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problems existing in the above-mentioned prior art, that is, in order to solve the problem that the currently commonly used high-precision miniature aerostatic turntable has many components, it is difficult to achieve particularly high precision requirements and dynamic balance, and the volume of the overall system Larger, especially a problem with larger height dimensions

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