A rotating sample stage

Abstract

The invention provides a rotating sample stage, comprising a revolution stage, the revolution stage is driven by a first driving device to rotate around a revolution axis, at least one sample stage is set at a certain distance from the revolution axis, and the sample stage is fixed on the revolution stage through a Supported by the first support, and driven to rotate by the autorotation transmission on the revolution table, the autorotation transmission is driven by the second drive device; the sample table has a bearing part for carrying the workpiece and a connecting part connected with the autorotation transmission, and the autorotation The transmission part can be stretched axially to push and pull the connecting part, and then push and pull the sample stage to rotate relative to the first supporting part, so as to adjust the inclination angle of the bearing part. The rotating sample stage of the present invention can not only make the workpiece perform revolution, rotation and planetary rotation relative to the material source, but also adjust the inclination angle of the bearing part according to the shape of the workpiece, thereby adjusting one or some faces of the workpiece to face the material source, It enables workpieces with complex surfaces to be plated with a film of uniform thickness.

Description

technical field [0001] The invention relates to a rotary sample stage, in particular to a multifunctional rotary sample stage for PVD coating. Background technique [0002] PVD is the abbreviation of Physical Vapor Deposition (Physical Vapor Deposition) in English. Physical vapor deposition technology refers to the use of physical methods to vaporize the surface of the material source (solid or liquid) into gaseous atoms, molecules or partial ionization into ions under vacuum conditions. And through the low-pressure gas or plasma process, the technology of depositing a thin film with a certain special function on the surface of the substrate. In the vacuum coating machine for coating the workpiece, the material source is generally fixed. In order to improve the uniformity of the coating of the workpiece, the sample stage supporting the workpiece is generally set as a rotatable sample stage; When the workpiece is coated, under the rotation of the rotating sample stage, diffe...

AI Technical Summary

Problems solved by technology

[0005] Therefore, the object of the present invention is to overcome the technical defect that the rotating sample stage in the prior art cannot adjust the inclination angle of the workpiece relative to the material source according to the shape of the workpiece, so that the scope of application is too narrow, thereby providing a rotary sample stage that can adjust according to the shape of the workpiece The inclination angle of the workpiece relative to the material source, so the rotating sample stage with a wide range of applications

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