Surface Acoustic Wave Temperature Sensor

A temperature sensor, surface acoustic wave technology, applied in thermometers, thermometers with physical/chemical changes, instruments, etc., can solve problems such as difficulty in main lobe identification, and achieve difficult main lobe identification, good frequency-temperature characteristics, and enhanced suppression. effect of ability

Active Publication Date: 2018-02-13
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In view of this, the main purpose of the present invention is to provide a surface acoustic wave temperature sensor, which can enhance the suppression ability of the temperature sensor to the side lobe in its frequency response characteristics, solve the problem of difficult identification of the main lobe in the frequency response of the device, in order to enhance the acoustic wave temperature sensor. Accuracy and Practicability of Surface Wave Temperature Sensors

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Embodiment Construction

[0025] The features and technical effects of the technical solution of the present invention will be described in detail below with reference to the accompanying drawings and in combination with schematic embodiments. A surface acoustic wave temperature sensor using Chebyshev window function apodization weighting is disclosed. It should be pointed out that similar reference numerals represent similar structures, and the terms "first", "second", "upper", "lower" and the like used in this application can be used to modify various device structures or manufacturing processes . These modifications do not imply spatial, sequential or hierarchical relationships of the modified device structures or fabrication processes unless specifically stated.

[0026] According to an embodiment of the present invention, a surface acoustic wave temperature sensor adopting Chebyshev window function apodization weighting is provided, and the device adopts a single-port resonator as the prototype st...

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Abstract

The invention discloses an acoustic surface wave temperature sensor which comprises a piezoelectric ceramic substrate, a reflection grating and an interdigital transducer, wherein the interdigital transducer adopts a Chebyshev window function as an apodization weighing design of a weighting function. According to the acoustic surface wave temperature sensor adopting the apodization weighing of the Chebyshev window function, the suppression capacity of the temperature sensor for a sidelobe in a frequency response characteristic is improved, the problem of difficulty in main lobe identification in device frequency response is solved, the accuracy and the practicability of the acoustic surface wave temperature sensor are improved, and the temperature sensor is high in frequency temperature characteristic.

Description

technical field [0001] The technical field of the surface acoustic wave device of the present invention is specifically a surface acoustic wave temperature sensor that adopts the Chebyshev window function as the weighting function and selects appropriate weighting parameters to carry out apodization weighting design on the interdigital transducer of the device. Background technique [0002] Today's society is rapidly entering the era of the Internet of Things based on and characterized by the common application of intelligent perception and ubiquitous networks. As the bottom layer of the Internet of Things system and the key to information collection, sensors determine the efficiency and intelligence of the entire Internet of Things system, which also brings a major opportunity for the development of various sensors and corresponding sensing technologies. As an important member of the sensor family, temperature sensors also have more and more important uses. Compared with t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/22
Inventor 周磊李冬梅梁圣法谢常青刘明
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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