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Method for carrying out optical measurement by using full-Mueller matrix ellipsometer

A full Mueller matrix and ellipsometer technology, applied in the field of optical measurement, can solve the problems of complex calibration process, increased system complexity, and complex optical measurement method of full Mueller matrix ellipsometer, etc. Accurate parameters and accurate measurement results

Inactive Publication Date: 2015-06-03
BEI OPTICS TECHNOLOGY COMPANY LIMITED +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The system is required to have a straight-through design with an adjustable incident angle, and there is a process of changing the incident angle during the calibration process. These methods increase the complexity of the system, and the calibration process is also more complicated.
[0006] Since the method of using the full Mueller matrix ellipsometer for optical measurement is carried out after the full Mueller matrix ellipsometer is calibrated, the calibration process of the full Mueller matrix ellipsometer is complicated, which will inevitably lead to the use of the full Mueller matrix ellipsometer. The method of optical measurement by ellipsometer is complex

Method used

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  • Method for carrying out optical measurement by using full-Mueller matrix ellipsometer
  • Method for carrying out optical measurement by using full-Mueller matrix ellipsometer
  • Method for carrying out optical measurement by using full-Mueller matrix ellipsometer

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Embodiment 1

[0028] The method for optical measurement using a full-Müller matrix ellipsometer provided in the first embodiment of the present invention includes the following steps:

[0029] Step 1: See attached figure 1 , The experimental optical path of the full-Müller matrix ellipsometer includes light source 1, ring mirror 2, pinhole 3, first off-axis parabolic mirror 4, polarizer 5, first phase compensator 6, first plane mirror 7 , Sample stage 8, second off-axis parabolic mirror 9, third off-axis parabolic mirror 10, second plane mirror 11, second phase compensator 12, analyzer 13, fourth off-axis parabolic mirror 14, spectrometer 15 And the terminal 16, the sample stage 8 carries an isotropic and uniform reference sample; the optical process of the experimental optical path of the full Muller matrix ellipsometer that can be locally regressed and self-calibrated is

[0030] S out =M A R(A′)R(-C′ 2 )M c2 (δ 2 )R(C′ 2 )×M s ×R(-C′ 1 )M c1 (δ 1 )R(C′ 1 )R(-P′)M p R(P)S in

[0031] which i...

Embodiment 2

[0097] See attached image 3 The difference between the full Muller matrix ellipsometer that can be locally regressed and self-calibrated provided in the second embodiment of the present invention and the full Mueller matrix ellipsometer that can be locally regressed and self-calibrated provided in the first embodiment of the present invention is that the present invention The local regression self-calibration method of the full-Müller matrix ellipsometer that can be locally regressed and self-calibrated provided in the second embodiment further includes the following steps:

[0098] According to each experiment Fourier coefficient α′ 2n , Β′ 2n Get each θ 2n , Here, θ 2n It is an intermediate parameter defined for the convenience of calculation;

[0099] According to each θ 2n Get the initial polarization angle C of the first phase compensator s1 ;

[0100] According to each θ 2n Get the initial polarization angle C of the second phase compensator s2 ;

[0101] According to each θ 2n...

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Abstract

The present invention discloses a method for carrying out optical measurement by using a full-Mueller matrix ellipsometer, and belongs to the technical field of optical measurements. According to the optical measurement method, the experiment optical path of the full-Mueller matrix ellipsometer is constructed, the full-Mueller matrix ellipsometer is subjected to local regression calibration, a sample to be measured is placed on a sample table, the experimental Fourier coefficient of the sample to be measured is obtained, and the information of the sample to be measured is obtained according to the experimental Fourier coefficient of the sample to be measured. According to the present invention, the calibration method of the full-Mueller matrix ellipsometer has the simple operation process, the measured data of the full-Mueller matrix ellipsometer at the same time is completely utilized, the introduced error is relatively small, and the parameter obtained from the calibration is accurate, such that the measurement result is accurate when the sample to be measured is measured, therefore, the process of the optical measurement method is simplified.

Description

Technical field [0001] The invention relates to the technical field of optical measurement, in particular to a method for optical measurement using a full-Müller matrix ellipsometer. Background technique [0002] Ellipsometer (abbreviated as ellipsometer) is an optical measuring instrument that uses the polarization characteristics of light to obtain information about the sample to be tested. The corresponding working principle is to obtain the information of the sample under test by measuring the polarization state changes (amplitude ratio and phase difference) of the incident light and reflected light on the sample surface before and after the light incident through the polarizer. The ellipsometer with rotating polarizer and rotating single compensator can obtain up to 12 parameters of the sample in one measurement. With the progress of integrated circuit technology and the complexity of device structure, the unknown quantity that needs to be measured continues to increase, mak...

Claims

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Application Information

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IPC IPC(8): G01N21/21
Inventor 崔高增刘涛李国光温朗枫熊伟
Owner BEI OPTICS TECHNOLOGY COMPANY LIMITED
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