A laser monitoring and analysis system for pulling furnace

Abstract

The invention discloses a laser monitoring and analysis system used for a lifting furnace. The system is used in monitoring and analysis during a growth process of crystals in a lifting furnace. According to the system, laser is used for actively illuminating the production environment in the lifting furnace. Imaging analysis is carried out upon the crystal growth process in the lifting furnace according to the laser reflected by the production environment. With the system, under a lifting furnace strong light environment, crystal growth process reliable and clear monitoring and analysis can be realized.

Description

technical field [0001] The invention relates to monitoring technology, in particular to a laser monitoring and analyzing system for a pulling furnace. Background technique [0002] In the crystal preparation process, the method of pulling and growing high-quality single crystals from the melt is called the pulling method. The raw materials constituting the crystals are synthesized in the solid phase or liquid phase, and after high-temperature sintering reaction, they are placed in the crucible of the pulling furnace. Heating and melting in medium, and then using the seed crystal to pull the melt, through temperature control, the seed crystal and the melt are continuously rearranged on the interface liquid surface, and gradually solidify as the temperature drops to grow a single crystal. In the crystal pulling method During the growth process, the temperature atmosphere of the melt, the rate of pulling, the volatile matter in the crystal growth, the vortex of the liquid surfa...

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Problems solved by technology

[0003] However, due to the high temperature of the crucible of the pulling furnace, the strong light generated makes it difficult for people to visually observe for a long time, and the light reduction and filtering methods in traditional video surveillance can easily filter out the information light waves in a strong light environment, making it difficult for people to The monitoring in the furnace is relatively difficult. So far, the pull furnaces commonly used in the domestic market lack an effective monitoring system for defect structure, crystal concentration, and volatiles, making it very difficult to grow high-quality large-size single crystals, especially single crystals of volatile raw materials. Crystal Lifting

At present, although some manufacturers have developed video monitoring equipment for this purpose, because they only use optical filters to deal with the strong light in the furnace, it is easy to lose useful light and affect the monitoring effect.

[0004] Patent Publication No. 203174220U discloses a crystal pulling generation monitoring device, which uses a camera to monitor the crystal growth process in the pulling furnace, but according to its description, the camera of the device only uses the light generated by the production process in the furnace. Imaging, due to the complex reaction in the furnace, the spectra generated during the production of various crystals are different and mixed in the strong light in the furnace, it is difficult for the existing passive imaging cameras to distinguish them, and it is difficult to ensure the imaging effect, thereby reducing the monitor quality

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