Glass substrate cleaning method

A glass substrate and cleaning liquid technology, applied in chemical instruments and methods, detergent compositions, detergent compounding agents, etc., can solve the problems of insufficient cleaning performance, inability to fully remove abrasive residues, etc., and achieve the effect of preventing peeling

Inactive Publication Date: 2015-07-15
ASAHI GLASS CO LTD +1
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] Then, for such residues of abrasives with cerium oxide particles as abrasive grains, for example, when using an alkaline cleaning solution containing inorganic or o

Method used

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  • Glass substrate cleaning method
  • Glass substrate cleaning method
  • Glass substrate cleaning method

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[0069] In Examples 1 and 2, when the composition is recorded as 100 parts, it will contain 9.0 parts of organic phosphonic acid, 1.0 part of polycarboxylate, 10.0 part of aromatic sulfonic acid, 1.0 part of amine-alkylene oxide, and the rest is the acidity of water. Washing agent stock solution (manufactured by Parker Co., Ltd., trade name; PK-LCG491A) is diluted with water so that the concentration of the stock solution (including water) reaches 0.5%, and the resulting acidic cleaning solution (pH 2.3 to 2.8) The surface of the polished glass substrate was sprayed at a flow rate of 25 L (hereinafter referred to as a cleaning liquid flow rate) within 1 minute, scrubbing with a rotating PVA brush, and after acid cleaning, alkali cleaning was performed. Alkaline cleaning is carried out by the following method: Dilute the stock solution of alkaline cleaning agent (manufactured by Parker, trade name; PK-LCG211) with water so that the concentration of the stock solution (including wa...

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Abstract

A method for cleaning a glass substrate after polishing, wherein a decrease in adhesion performance of a resin BM film formed on the cleaned glass substrate surface is suppressed and peeling of the resin BM film is prevented. A glass substrate cleaning method, characterized in that a glass substrate polished using a polishing agent containing cerium oxide particles is washed using an acidic aqueous cleaning liquid containing an organic acid and then washed using an alkaline aqueous cleaning liquid containing a base.

Description

technical field [0001] The present invention relates to a cleaning method for cleaning a glass substrate polished with an abrasive containing cerium oxide particles, and particularly relates to a cleaning method for cleaning a glass substrate for a liquid crystal display device or the like. Background technique [0002] For glass substrates used in FPDs (Flat Panel Displays) such as liquid crystal displays (LCDs), for example, glass substrates formed into a plate shape from molten glass are ground with a grinding tool that rotates and revolves to remove fine particles on the surface. Concave-convex and waviness are formed into a thin plate shape with a predetermined thickness (for example, 0.4 to 1.1 mm) satisfying the flatness required for a glass substrate for FPD. [0003] In the grinding of such glass substrate, use the abrasive (slurry) that contains cerium oxide particle as abrasive grain, after grinding, implement and utilize cleaning liquid to clean and remove the ab...

Claims

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Application Information

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IPC IPC(8): C03C23/00C11D1/44C11D3/20C11D3/34C11D3/36G02F1/1333
CPCC11D3/362C11D3/20C03C23/00C11D3/34C11D11/0064C11D11/0035C11D3/044C11D3/3418C11D1/44C11D11/0041C11D3/2082C11D3/36C03C23/0075
Inventor 榎本久男佐原幸治石川智章城山厚前柳佳孝竹中敦义小林大介高桥秀幸中岛阳司
Owner ASAHI GLASS CO LTD
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