A Hyperspectral Resolution X-ray Grazing Incidence Microscopic Imaging System

A microscopic imaging and grazing incidence technology, which is applied in the fields of X-ray optics and ion plasma diagnosis, can solve the problems of poor energy resolution of multi-layer films, achieve the effect of small solid angle of receiving light, reduce aberration, and improve spatial resolution

Active Publication Date: 2018-03-16
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, at present, the energy resolution of multilayer films is poor, and generally only reaches tens of eV, which is difficult to meet the experimental requirements.

Method used

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  • A Hyperspectral Resolution X-ray Grazing Incidence Microscopic Imaging System
  • A Hyperspectral Resolution X-ray Grazing Incidence Microscopic Imaging System
  • A Hyperspectral Resolution X-ray Grazing Incidence Microscopic Imaging System

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] figure 1 , figure 2 It is a schematic diagram of the optical path of Embodiment 1 of the present invention. The first optical device 1 adopts a multilayer film reflector, and the second optical device 2 adopts a curved crystal. The optical axes of the multilayer film reflector and the curved crystal are perpendicular to each other. The X-ray passes through the multi-layer film mirror and is focused in the meridional direction to form a quasi-monochromatic one-dimensional image, and then through the curved crystal to achieve focus in the sagittal direction, and through the curved crystal to split light to form a highly monochromatic two-dimensional image , and finally imaged onto the recording medium. The main parameters of the system are selected according to the requirements of conventional ICF diagnosis. The specific parameters are as follows: working energy point 2.5keV, object distance 142.5mm, distance between mirror and curved crystal 20mm, image distance 2850mm...

Embodiment 2

[0033] Figure 14 , Figure 15 It is a schematic diagram of the optical path of Embodiment 2 of the present invention. Both the first optical device 1 and the second optical device 2 of this embodiment use spherical curved crystals, and the Si (111) crystal plane is selected as the curved crystal reflection surface. According to the Bragg principle, the crystal The surface is 14.308° at 8keV grazing incidence angle (ie Bragg angle). See Table 1 and Table 2 for detailed parameters and optical component parameters.

[0034] Table 1

[0035] object distance

spacing

image distance

energy point

gain

Collecting solid angle

200mm

20mm

4000mm

8keV

20

1×10 -6 sr

[0036] Table 2

[0037]

[0038] Figure 14 , Figure 15 As shown in , 3 is the incident light, 4 is the outgoing light and 5 is the Bragg angle.

[0039] The scheme proposed in Example 2 is simulated by using the X-ray simulation software SHADOW. Light sou...

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Abstract

The present invention provides a hyperspectral resolution X-ray grazing incidence microscopic imaging system, which includes two grazing incidence curved surface X-ray optical devices named as the first optical device and the second optical device respectively, the first optical device and the second optical device The optical axis of the second optical device is orthogonal, the X-ray emitted by the object point is reflected by the first optical device, and focused in the meridional direction to form a quasi-monochromatic one-dimensional image, and then realized in the sagittal direction by the second optical device The light is split and focused to form a highly monochromatic two-dimensional image, which is finally imaged on a recording medium. The hyperspectral resolution X-ray grazing incidence microscopic imaging system of the present invention has the characteristics of high spatial resolution, good energy resolution and small aberration, and well overcomes the shortcomings of traditional X-ray microscopes.

Description

technical field [0001] The invention relates to the fields of plasma diagnosis, X-ray optics and the like, in particular to an ultra-high spectral resolution X-ray grazing incidence microscopic imaging system. Background technique [0002] In the field of X-ray diagnosis, two-dimensional image diagnosis with spectral resolution is an important field. At present, the commonly used plasma two-dimensional distribution diagnosis is mainly divided into three methods: pinhole camera imaging, curved crystal imaging and KB imaging. [0003] Pinhole imaging is the most commonly used imaging method, but due to the limitation of numerical aperture, the spatial resolution and light collection efficiency are low. At the same time, the energy spectrum resolution is realized by adding filters of different materials in the optical path. Due to the energy spectrum selection of the filter itself The bandwidth is very wide, making the energy resolution of the pinhole imaging method poor. [...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/00
Inventor 丁永坤曹柱荣邓博陈韬安宁王秋平江少恩
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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